Proceedings of the 19th International Symposium on Power Semiconductor Devices and IC's 2007
DOI: 10.1109/ispsd.2007.4294990
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6kV 4H-SiC BJTs with Specific On-resistance Below the Unipolar Limit using a Selectively Grown Base Contact Process

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Cited by 35 publications
(11 citation statements)
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“…The fundamental limits for the drift region resistance of unipolar devices fabricated in SiC and GaN are shown by solid lines, with GaN shown as a range based on the literature and our observations. Published results from vertical SiC power devices show that commercial SiC devices are already approaching the theoretical limit for this material system [1][2][3][4]. Published results from lateral (horizontal) GaN power devices fabricated on sapphire, SiC, or silicon substrates, on the other hand are far from the fundamental GaN limit.…”
Section: Introductionmentioning
confidence: 99%
“…The fundamental limits for the drift region resistance of unipolar devices fabricated in SiC and GaN are shown by solid lines, with GaN shown as a range based on the literature and our observations. Published results from vertical SiC power devices show that commercial SiC devices are already approaching the theoretical limit for this material system [1][2][3][4]. Published results from lateral (horizontal) GaN power devices fabricated on sapphire, SiC, or silicon substrates, on the other hand are far from the fundamental GaN limit.…”
Section: Introductionmentioning
confidence: 99%
“…2 shows the specific ON-resistance of various SiC switches in comparison with modern silicon devices. Of course, this is a simplified view as the devices [14,20,[24][25][26][27][28][29][30][31][32][33][34][35] NB: For the bipolar devices R ON A was calculated as the voltage drop at a nominal current density divided by the nominal current density For the references other than the indicated see [3] www.ietdl.org…”
Section: Conclusion On Sic-switchesmentioning
confidence: 99%
“…Besides, gaining lower onresistance results in lower loss which is as important as improving the breakdown voltage to its theoretical value. Several termination techniques have been developed and optimized to approach the ideal breakdown voltage and improve the termination efficiency [1][2][3][4][5][6][7][8][9][10][11][12]. Among them, implantation-free devices with low R ON have the advantage of preventing life-time-killing defects and current degradation caused by ion implantation [10].…”
Section: Introductionmentioning
confidence: 99%