2017
DOI: 10.1002/adfm.201605914
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3D Tunable, Multiscale, and Multistable Vibrational Micro‐Platforms Assembled by Compressive Buckling

Abstract: Microelectromechanical systems remain an area of significant interest in fundamental and applied research due to their wide ranging applications. Most device designs, however, are largely two-dimensional and constrained to only a few simple geometries. Achieving tunable resonant frequencies or broad operational bandwidths requires complex components and/or fabrication processes. The work presented here reports unusual classes of three-dimensional (3D) micromechanical systems in the form of vibratory platforms … Show more

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Cited by 43 publications
(31 citation statements)
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References 46 publications
(33 reference statements)
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“…An attractive feature of these strategies is that they are naturally compatible with advanced circuit designs and chip‐scale components, packaged or unpackaged, in conventional and various electronic, optoelectronic, and energy devices. Collectively, these features suggest new opportunities in circuit/system‐level design applicable to 3D dynamic platforms, biological systems, and classes of sensors/actuators …”
Section: Resultsmentioning
confidence: 99%
“…An attractive feature of these strategies is that they are naturally compatible with advanced circuit designs and chip‐scale components, packaged or unpackaged, in conventional and various electronic, optoelectronic, and energy devices. Collectively, these features suggest new opportunities in circuit/system‐level design applicable to 3D dynamic platforms, biological systems, and classes of sensors/actuators …”
Section: Resultsmentioning
confidence: 99%
“…[125] Moreover, similar ideas also enable tunable opto/ mechanical systems, including micromirrors [126] with adjustable focal length, optical shutters [34] with controllable transmission values, and mechanical resonators with tunable frequencies. [127] Biological systems are inherently 3D. 3D systems like those reported here could, therefore, serve as the basis for volumetric biointerfaces in fundamental studies or, ultimately, clinical use.…”
Section: Functional 3d Systemsmentioning
confidence: 89%
“…Unlike other electronic devices, MEMS are often designed to move or oscillate, with the mechanical oscillations generating an electrical output . 3D MEMS offer vastly improved bandwidth and frequency tunability over conventional 2D MEMS structures, such as cantilever beams and doubly clamped bridges . In a recent study, we investigated different resonant vibrational frequencies of 3D table and rotated table structures.…”
Section: Introductionmentioning
confidence: 99%