Fabrication and Mechanical Cycling of Polymer Microscale Architectures for 3D MEMS Sensors

Humood, Mohammad; Lefebvre, Joseph; Shi, Yan; Han, Mengdi; Fincher, Cole D.; Pharr, Matt; Rogers, John A.; Polycarpou, Andreas A.

doi:10.1002/adem.201801254

Cited by 9 publications

(4 citation statements)

References 32 publications

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“…Although the ability to bend can be effectively integrated into small areas or simple curved areas of the body, the complex texture and natural and complex movements of the skin cannot be adapted solely through bending [101][102][103][104][105]. Therefore, the study of stretchability, 3D structures, and other types of structures is crucial.…”

Section: Engineering Materials Structurementioning

confidence: 99%

E-Polymers: Applications in Biological Interfaces and Organisms

Dou,

Wang,

Yang

2023

Nanoenergy Advances

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Future electronics will play a more critical role in people’s lives, as reflected in the realization of advanced human–machine interfaces, disease detection, medical treatment, and health monitoring. The current electronic products are rigid, non-degradable, and cannot repair themselves. Meanwhile, the human body is soft, dynamic, stretchable, degradable, and self-healing. Consequently, it is valuable to develop new electronic materials with skin-like properties that include stretchability, inhibition of invasive reactions, self-healing, long-term durability, and biodegradability. These demands have driven the development of a new generation of electronic materials with high-electrical performance and skin-like properties, among which e-polymers are increasingly being more extensively investigated. This review focuses on recent advances in synthesizing e-polymers and their applications in biointerfaces and organisms. Discussions include the synthesis and properties of e-polymers, the interrelationships between engineered material structures and human interfaces, and the application of implantable and wearable systems for sensors and energy harvesters. The final section summarizes the challenges and future opportunities in the evolving materials and biomedical research field.

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Section: Engineering Materials Structurementioning

confidence: 99%

E-Polymers: Applications in Biological Interfaces and Organisms

Dou,

Wang,

Yang

2023

Nanoenergy Advances

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“…Recently, several in situ studies have been presented, revealing the load‐displacement responses of five table‐shaped 3D polymer mesostructures. [ 66,67 ] However, other commonly used material systems (e.g., metal and metal/polymer laminates [ 34,44,68 ] ) in 3D flexible electronics were not discussed in these works, [ 66,67 ] and no design principles or failure criteria have been proposed. Therefore, a systematic design strategy based on the comprehensive understanding of underlying failure mechanisms is highly desirable for 3D ribbon‐shaped flexible electronics.…”

Section: Introductionmentioning

confidence: 99%

An Anti‐Fatigue Design Strategy for 3D Ribbon‐Shaped Flexible Electronics

Zhang

et al. 2021

Advanced Materials

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Three‐dimensional (3D) flexible electronics represent an emerging area of intensive attention in recent years, owing to their broad‐ranging applications in wearable electronics, flexible robots, tissue/cell scaffolds, among others. The widely adopted 3D conductive mesostructures in the functional device systems would inevitably undergo repetitive out‐of‐plane compressions during practical operations, and thus, anti‐fatigue design strategies are of great significance to improve the reliability of 3D flexible electronics. Previous studies mainly focused on the fatigue failure behavior of planar ribbon‐shaped geometries, while anti‐fatigue design strategies and predictive failure criteria addressing 3D ribbon‐shaped mesostructures are still lacking. This work demonstrates an anti‐fatigue strategy to significantly prolong the fatigue life of 3D ribbon‐shaped flexible electronics by switching the metal‐dominated failure to desired polymer‐dominated failure. Combined in situ measurements and computational studies allow the establishment of a failure criterion capable of accurately predicting fatigue lives under out‐of‐plane compressions, thereby providing useful guidelines for the design of anti‐fatigue mesostructures with diverse 3D geometries. Two mechanically reliable 3D devices, including a resistance‐type vibration sensor and a janus sensor capable of decoupled temperature measurements, serve as two demonstrative examples to highlight potential applications in long‐term health monitoring and human‐like robotic perception, respectively.

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“…However, in comparision to 2D devices, bioinspired 3D flexible electronic devices undergo more complex loading, resulting in distinct and even elusive deformation modes and failure mechanisms. For example, some 3D mesostructures and electronic devices tend to collapse downwards under extreme out-of-plane compression, possibly leading to destructive collapse, irreversible deformation, and even material rupture [71][72][73].…”

Section: Introductionmentioning

confidence: 99%

Bioinspired design and assembly of a multilayer cage-shaped sensor capable of multistage load bearing and collapse prevention

Xu¹,

Liu²,

Jin³

et al. 2021

Nanotechnology

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Flexible bioinspired mesostructures and electronic devices have recently attracted intense attention because of their widespread application in microelectromechanical systems (MEMS), reconfigurable electronics, health-monitoring systems, etc. Among various geometric constructions, 3D flexible bioinspired architectures are of particular interest, since they can provide new functions and capabilities, compared to their 2D counterparts. However, 3D electronic device systems usually undergo complicated mechanical loading in practical operation, resulting in complex deformation modes and elusive failure mechanisms. The development of mechanically robust flexible 3D electronics that can undergo extreme compression without irreversible collapse or fracture remains a challenge. Here, inspired by the multilayer mesostructure of Enhydra lutris fur, we introduce the design and assembly of multilayer cage architectures capable of multistage load bearing and collapse prevention under large out-of-plane compression. Combined in situ experiments and mechanical modeling show that the multistage mechanical responses of the developed bionic architectures can be fine-tuned by tailoring the microstructural geometries. The integration of functional layers of gold and piezoelectric polymer allows the development of a flexible multifunctional sensor that can simultaneously achieve the dynamic sensing of compressive forces and temperatures. The demonstrated capabilities and performances of fast response speed, tunable measurement range, excellent flexibility, and reliability suggest potential uses in MEMS, robotics and biointegrated electronics.

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Fabrication and Mechanical Cycling of Polymer Microscale Architectures for 3D MEMS Sensors

Cited by 9 publications

References 32 publications

E-Polymers: Applications in Biological Interfaces and Organisms

E-Polymers: Applications in Biological Interfaces and Organisms

An Anti‐Fatigue Design Strategy for 3D Ribbon‐Shaped Flexible Electronics

Bioinspired design and assembly of a multilayer cage-shaped sensor capable of multistage load bearing and collapse prevention

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