2-D Electrostatic Actuation of Microshutter Arrays

Burns, Devin E.; Oh, Lance; Li, Mary J.; Kelly, Daniel P.; Kutyrev, A.; Moseley, S. H.

doi:10.1109/jmems.2015.2498411

Cited by 9 publications

(8 citation statements)

References 8 publications

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“…40 This review focuses on microshutters fabricated on glass substrates to control the light transmission. Other groups such as the one at NASA 41 have worked on microshutter arrays based on Si substrates The devices described in this review are similar to cantilevers (basic MEMS structure). Nevertheless, microshutters have the top mobile electrode curling up based on stress gradient.…”

Section: Microelectromechanical System Microshuttersmentioning

confidence: 99%

Review of microshutters for switchable glass

Lamontagne

Fong

Song

et al. 2019

J. Micro/Nanolith. MEMS MOEMS

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Background: Switchable glasses allow the control of light transmission-an attractive property for applications such as car sunroofs, aircraft windows, building windows, augmented reality, imaging, and displays. Commercialized switchable glasses have severe limitations, such as speed, cost, and operating conditions, among others. Microshutters, a type of switchable glass with very distinctive properties, are reviewed, as they are a technology that could significantly improve some or all of the shortcomings mentioned above. Aim: We will summarize the various types of microshutters and tentatively identify various critical designs, fabrication schemes, and performance criteria by the many research groups implementing them and investigating their properties. Approach: We will describe the various approaches used to control light transmission through microelectromechanical systems. It will compare their performances and comment on fabrication and implementation challenges. Conclusions: Microshutters have performance levels that could make them good candidates for switchable glasses. Many research groups have investigated various approaches to fabricate microshutters and have shown that they can be implemented reliably on a small scale, with fast actuation, low power, and high contrast and are relatively easy to manufacture. Work is needed to demonstrate that they can be scaled-up and still be economical to produce.

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Section: Microelectromechanical System Microshuttersmentioning

confidence: 99%

Review of microshutters for switchable glass

Lamontagne

Fong

Song

et al. 2019

J. Micro/Nanolith. MEMS MOEMS

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“…When the microshutters opened with the DC pulse, a DC voltage on the back electrode was applied to bring the microshutters to the back electrode and held the microshutters open. The required back electrode voltage was -25 V [4]. During the actuation, the silicon frame on the MSA and silicon substrate are grounded.…”

Section: Bmentioning

confidence: 99%

Fabrication and Sub-Assembly of Electrostatically Actuated Silicon Nitride Microshutter Arrays

Kim

et al. 2018

2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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We have developed a new microshutter array (MSA) subassembly. The MSA and a silicon substrate are flip-bonded together. The MSA has a new back side fabrication process to actuate the microshutters electrostatically, and the new silicon substrate has light shields. The microshutters with a pixel size of 100 x 200 µm 2 are fabricated on silicon with thin silicon nitride membranes. The microshutters rotate 90 o on torsion bars. The selected microshutters are actuated, held, and addressed electrostatically by applying voltages on the electrodes the front and back sides of the microshutters. The substrate has the light shield to block lights around the microshutters. Also, electrical connections are made from the MSA to a controller board via the substrate.

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“…NGMSA arrays are fabricated with a silicon nitride thickness of 250nm, the half of the thickness of previous shutters made for JWST. Using a micro-mechanical testing system with a 0.1 micro-Newton accuracy, we measured force vs. deflection data from the NGMSA shutters and previous fabricated shutters as comparison 7 . The testing results indicated that the NGMSA shutter torsion bars stiffness was reduced to one fourth of the previous shutters.…”

Section: Ngmsa Fabricationmentioning

confidence: 99%

“…The DC pulsed actuation and 2-D addressing sequence is shown in Figure 9. Again, only selected shutters were latched by applying -25V DC to the back electrodes of shutters in two selected columns and 100V DC, 200 µsec pulses to the front electrodes of shutters in two selected rows 7 . The 100V pulse imparts enough energy to swing the shutters in the rows partly open.…”

Section: Ngmsa Actuation and 2-d Addressingmentioning

confidence: 99%

Electrostatic microshutter arrays

Brown

Burns

et al. 2017

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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Based on the Microshutter Array (MSA) subsystems developed at NASA Goddard Space Flight Center (GSFC) for the James Webb Space Telescope (JWST), Next Generation Microshutter Array (NGMSA) has been developed to be used as multi-object selectors for future telescopes in space applications. Microshutter arrays function as transmission devices. Selected shutters fully open at 90 degrees permitting income light going through, while the rest of shutters keep closed. The programmable microshutter open and close make the device perform as a multi object selector that can be used on space telescopes. Utilizing a multi object selector, the telescope efficiency can be increased to 100 times or more. Like JWST MSAs, NGMSA features torsion hinges, light shields, front and back electrodes for shutter actuation, latch, and closing. The difference is that JWST MSA utilized the magnetic actuation while NGMSA the electrostatic actuation.

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2-D Electrostatic Actuation of Microshutter Arrays

Cited by 9 publications

References 8 publications

Review of microshutters for switchable glass

Review of microshutters for switchable glass

Fabrication and Sub-Assembly of Electrostatically Actuated Silicon Nitride Microshutter Arrays

Electrostatic microshutter arrays

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