Review of microshutters for switchable glass

Abstract

Background: Switchable glasses allow the control of light transmission-an attractive property for applications such as car sunroofs, aircraft windows, building windows, augmented reality, imaging, and displays. Commercialized switchable glasses have severe limitations, such as speed, cost, and operating conditions, among others. Microshutters, a type of switchable glass with very distinctive properties, are reviewed, as they are a technology that could significantly improve some or all of the shortcomings mentioned above. Aim: We will summarize the various types of microshutters and tentatively identify various critical designs, fabrication schemes, and performance criteria by the many research groups implementing them and investigating their properties. Approach: We will describe the various approaches used to control light transmission through microelectromechanical systems. It will compare their performances and comment on fabrication and implementation challenges. Conclusions: Microshutters have performance levels that could make them good candidates for switchable glasses. Many research groups have investigated various approaches to fabricate microshutters and have shown that they can be implemented reliably on a small scale, with fast actuation, low power, and high contrast and are relatively easy to manufacture. Work is needed to demonstrate that they can be scaled-up and still be economical to produce.

MOEMS micromirror arrays in smart windows for daylight steering

“…Recently, Lamontagne et al 21 published a laboriously researched review article on microshutters giving a valuable overview about that class of technology. This review also included our micromirror arrays.…”

Switchable Glass Enabled Contextualization for a Cyber-Physical Safe and Interactive Spatial Augmented Reality PCBA Manufacturing Inspection System

“…Switchable glass or smart glass is an active [ 37 ], electrically controllable glass upon its opaqueness or transparency [ 35 ]. This glass takes three main forms namely: suspended particle devices (SPD) where the degree of transparency is proportional to applied voltage; electrochromic devices (ECD) that are opaque upon voltage application and the degree similarly vary with applied voltage and the liquid crystal devices or polymer device liquid crystal (PDLC) that only assume either on or off states upon voltage application or withdrawal, respectively.…”

Оконные Оптические Микроструктуры (Обзор)

“…Часть исследователей ограничилась однократной публикацией результатов. Продолжают разработки группы в Канаде [32,34] и в университете г. Кассель в Германии [31,[35][36][37][38]. Подробные результаты опубликованы в виде отчета [35], статей [36,37] и диссертации [38].…”

“…22. Изображения в сканирующем электронном микроскопе оптических микроэлектромеханических систем в открытом состоянии: a -микрожалюзи [30], b -микрожалюзи [34], c -микрожалюзи [33], d -микрозеркала [38]. некомпенсированных внутренних напряжений изгибается и микрозеркало отходит от стекла.…”

“…Типичная схема изготовления микрожалюзи[34]. (a) Cтеклянная подложка с нанесенными последовательно слоями прозрачного электропроводящего оксида ITO -нижний электрод (ITO -Indium Tin Oxide -легированный оловом оксид индия In 2 O 3 : Sn), изолятора (SiO 2 ) и жертвенного слоя; (b) структурирование жертвенного слоя фотолитографией для освобождения места крепления якоря; (c) напыление верхнего двухслойного электрода; (d) структурирование верхнего электрода фотолитографией; (e) высвобождение микрожалюзи путем удаления жертвенного слоя.…”