Electrostatic microshutter arrays

Abstract

Based on the Microshutter Array (MSA) subsystems developed at NASA Goddard Space Flight Center (GSFC) for the James Webb Space Telescope (JWST), Next Generation Microshutter Array (NGMSA) has been developed to be used as multi-object selectors for future telescopes in space applications. Microshutter arrays function as transmission devices. Selected shutters fully open at 90 degrees permitting income light going through, while the rest of shutters keep closed. The programmable microshutter open and close make the device perform as a multi object selector that can be used on space telescopes. Utilizing a multi object selector, the telescope efficiency can be increased to 100 times or more. Like JWST MSAs, NGMSA features torsion hinges, light shields, front and back electrodes for shutter actuation, latch, and closing. The difference is that JWST MSA utilized the magnetic actuation while NGMSA the electrostatic actuation.

A Path to High-Efficiency Optical Coupling for HIRMES

“…In an effort to mitigate the capillary force we fabricated a new batch of backshort chips and applied an anti-stiction coating to the surface of the deposited gold layer using an Integrated Surface Technologies RPX-540 vapor deposition system. The coating used is perfluorodecyltrichlorosilane, also known as FDTS, a long chain that produces hydrophobic surfaces, which has been shown to prevent stiction in MEMS devices [11]. In addition, during all aspects of assembly we utilized ionizing fans.…”

Actuation force analysis and design optimization of microshutter array by numerical simulation method

“…The original MSA is magnetically actuated by a moving magnet and selected shutters stay open by electrostatic latching. A Next Generation Microshutter Array (NGMSA) [4][5][6][7] has been developed as an evolution of the JWST microshutter design which eliminates the complexity of magnetic actuation and achieves highly simplified operation by all-electrostatic actuation and latching.…”

“…Note that the frame is fixed in xyz coordinate, while y´and z´axes move with shutter blade. More detailed information about the device structure and the fabrication process can be found on these previous articles [6,7].…”