2018
DOI: 10.1590/1980-5373-mr-2018-0224
|View full text |Cite
|
Sign up to set email alerts
|

Physical Properties of Sputtered Indium-doped ZnO Films Deposited on Flexible Transparent Substrates

Abstract: Indium-doped zinc oxide (IZO) polycrystalline thin films were grown on polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and as reference on 7059 Corning glass substrates at room temperature by radio frequency magnetron sputtering from a target prepared with a mixture of ZnO and In 2 O 3 powders. The structural, optical, and electrical properties of the films were analyzed and compared. The IZO polycrystalline films showed n-type conductivity. The electrical resistivity drops significantly, and… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
2

Citation Types

0
10
0

Year Published

2019
2019
2022
2022

Publication Types

Select...
9

Relationship

0
9

Authors

Journals

citations
Cited by 13 publications
(10 citation statements)
references
References 28 publications
0
10
0
Order By: Relevance
“…Typically, a higher Φ TC indicates an increased performance for transparent conducting films. The Φ TC for the IMO/AZO/mica structure with various thicknesses, IMO films 17,20,21,[23][24][25][26][27][28][29][30][31][32][33][34] and numerous TCO films on flexible substrates 14,[35][36][37][38][39][40][41][42][43][44] are shown in Fig. 3b.…”
Section: Resultsmentioning
confidence: 99%
“…Typically, a higher Φ TC indicates an increased performance for transparent conducting films. The Φ TC for the IMO/AZO/mica structure with various thicknesses, IMO films 17,20,21,[23][24][25][26][27][28][29][30][31][32][33][34] and numerous TCO films on flexible substrates 14,[35][36][37][38][39][40][41][42][43][44] are shown in Fig. 3b.…”
Section: Resultsmentioning
confidence: 99%
“…Some of the studies related to In doped ZnO films grown by different techniques were analyzed, and IZO main features were reported in Table 1. [36] Pyrosol method ~49; ~62 -1.3 × 10 −2 ; 3.0 × 10 -3 Silva-Lopez et al [21] RF magnetron sputtering 16.4; 16.0 3.2 ± 0.1 2.9 ± 0.7 × 10 −3 Rambu et al [37] Thermal evaporation 29; 24 According to the studies reported in Table 1, the characteristics of ZnO depend on both growth technique and In doping content. In other words, ZnO, which is characterized by the hexagonal wurtzite structure, may exhibit different characteristics due to defects such as zinc interstitials and oxygen vacancies, which depend on the growth technique and growth parameters.…”
Section: Resultsmentioning
confidence: 99%
“…This means that ZnO has a very wide range of applications. Nevertheless, the bibliometric analysis evidenced high interest towards Al doped ZnO (AZO), which is the most investigated ITO alternative, and In was selected in this review as the ZnO dopant, because it has the advantage of less reactivity and higher oxidation resistance than other additives of the same group [21]. Indium is, at present, listed among CRMs, however its content in indium doped zinc oxide (IZO) is quite low with respect to ITO.…”
Section: Introductionmentioning
confidence: 99%
“…Among these methods, RF magnetron sputtering is an excellent method due to its ability to coat heat-sensitive substrates, high-purity films, dense pore-free coating, and good adhesion (30 MPa) [28,29]. However, the IZO film seems to be problematic since it is based only on RF magnetron sputtering with surface roughness, easy cracks, and uneven surface or edge [30].…”
Section: Introductionmentioning
confidence: 99%