The article considers the results of studies of the emission spectra of Kr, Xe upon excitation by pulsed laser radiation. We used Nd: YAG laser, λ = 1064 nm, τ = 5 ns, and Epulse = 0.8 J. The spectral range of 30-200A was studied. We used capillary with d = 500 μm and supersonic conical nozzles with dcr = 145 μm, 2α = 12o, L = 5 mm, and dcrit = 450 μm, 2α = 11o, L = 5 mm to form a gas jet. The emission spectra for various gas targets were obtained, the obtained spectra were deciphered, and the ions emitting in this spectral range were determined. We observed that with increasing particle concentration in the zone of laser spark, the radiation intensity increases. In this case, the intensity of ion lines with high degrees of ionization increases faster.
Поступило в Редакцию 28 марта 2019 г. В окончательной редакции 28 марта 2019 г. Принято к публикации 15 апреля 2019 г.Приведены результаты исследований газоструйного лазерно-плазменного источника экстремального ультрафиолетового излучения на базе конического сверхзвукового сопла. В качестве мишени использовались молекулярно-кластерные струи CO 2 . Изменением параметров газа на входе в сопло были получены различные режимы истечения газа, изучено влияние данных режимов на эмиссионные и технические характеристики источника излучения. Экспериментально показано увеличение эмиссии излучения при увеличении количества кластеризованного вещества в струе.Ключевые слова: кластеры, лазерно-плазменный источник излучения, лазерная искра, экстремальное ультрафиолетовое излучение.
The article considers the results of studies of the emission spectra of Ne and Ar upon excitation by pulsed laser radiation. We used Nd: YAG laser, λ = 1064 nm, τ = 5 ns, and Epulse = 0.8 J. The spectral range of 3-20 nm was studied. We used capillary and supersonic conical nozzles with dcr = 145 μm, 2α = 12o, L = 5 mm, and dcr = 450 μm, 2α = 11o, L = 5 mm to form an atomic cluster beam. The emission spectra for various gas targets were obtained, the obtained spectra were deciphered, and the ions emitting in this spectral range were determined. We observed that with increasing particle concentration in the zone of laser spark, the radiation intensity increases. In this case, the intensity of ion lines with high degrees of ionization increases faster.
Using a multilayer mirror spectrometer of the extreme ultraviolet (EUV) range, the laser plasma emission spectra of bulk aluminum in the wavelength range of 8.0-18.0 nm were studied. Testing of thin film laser targets made of aluminum and comparative measurements of the intensity of EUV radiation of a film with a thickness of 100 nm and a bulk material target were carried out.
Multilayer interference structures acting as dispersion elements for a mirror spectrometer for a wavelength range of 7-30 nm have been calculated and synthesized. Three elements are implemented: for the range λ=7-12 nm – multilayer structure Mo/B4C (periods N=60; period thickness d=6.50 nm); for the range λ=11-18 nm – Mo/Be (N=50; d=9.83 nm) and for the range λ=17-30 nm – Be/Si/Al (N=40; d=18.2 nm). For the entire spectral range, an efficiency of more than 10% was obtained at a wavelength resolution of 0.15-1.0 nm.
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