On the basis of the hybrid hydrodynamic model for the gas discharge, numerical experiments were performed. The main parameters of the electric discharge of a direct current with copper cathode and anode were obtained. The obtained data were used as the main conditions for molecular-dynamics simulations of the copper vapor nucleation process in the argon. The results of the simulation formed the basis for the development of an experimental setup for the plasma synthesis of copper nanoparticles.
A low pressure glow discharge in a transverse supersonic gas flow was experimentally studied for the case where the flow only partially fills the interelectrode gap. It is shown that the space region with super sonic gas flow has a higher concentration of gas particles and, therefore, works as a charged particle generator. The near electrode regions of glow discharge are concentrated specifically in this region. This structure of glow discharge is promising for plasma deposition of coatings under ultralow pressures.
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