A low pressure glow discharge in a transverse supersonic gas flow was experimentally studied for the case where the flow only partially fills the interelectrode gap. It is shown that the space region with super sonic gas flow has a higher concentration of gas particles and, therefore, works as a charged particle generator. The near electrode regions of glow discharge are concentrated specifically in this region. This structure of glow discharge is promising for plasma deposition of coatings under ultralow pressures.
A discharge device providing the ability to create an area in the interelectrode space with a controlled concentration of neutral particles due to the supersonic flow arrangement has been developed and implemented. The possibility to control the internal discharge parameters distribution by supersonic gas flow arrangement in a limited area of the glow discharge is shown experimentally.
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