Control of glow discharge parameters using transverse supersonic gas flow - numerical experiment

Saifutdinov, A. I.; Тимеркаев, Б. А.; Zalyaliev, B. R.

doi:10.1088/1742-6596/567/1/012031

Cited by 11 publications

(2 citation statements)

References 6 publications

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“…There is fundamentally new solution to this problem [1,2]. It is creation of zones with different concentrations of neutral particles in electrode gap.…”

Section: Relevancementioning

confidence: 99%

“…Reaching the stable quality of finished product, its cost is reduced and there is a possibility of its mass implementation. Analysis of technological surface treatment processes showed that control of process parameters and analysis of systems working capacity is difficult due to the of ultrafast processes in high-energy technology complex [1,2]. Maintaining the stability of the process variables is possible due to system response in a short time.…”

Section: Relevancementioning

confidence: 99%

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Ion source surface processing based on glow discharge in supersonic cross gas flow control

Israphilov

2017

IOP Conf. Ser.: Mater. Sci. Eng.

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Abstract. Surface treatment by glow discharge in a transverse gas flow provides a number of advantages over magnetron discharge. Sputtering target at lower pressures, which increases the purity of the deposited material. In addition, more uniform erosion of target and thickness of deposited coating. However is necessary to develop glow discharge control system in cross flow working gas, which allow to obtain products with desired characteristics.

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“…There is fundamentally new solution to this problem [1,2]. It is creation of zones with different concentrations of neutral particles in electrode gap.…”

Section: Relevancementioning

confidence: 99%

Section: Relevancementioning

confidence: 99%

Ion source surface processing based on glow discharge in supersonic cross gas flow control

Israphilov

2017

IOP Conf. Ser.: Mater. Sci. Eng.

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Controlling the structure of a glow discharge by supersonic gas flow

et al. 2022

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The effect of supersonic gas flow on glow discharge characteristics in interelectrode space is studied. First, gas outflow through a Laval nozzle with a central body was simulated: gas particle density distributions, gas flow velocity, Mach number, and temperature were obtained. Next, these profiles were used for numerical calculations of the parameters of a transverse glow discharge within the framework of an extended fluid description of the plasma. As a result, it was found that the cathode zones can both shrink and stretch depending on the parameters of the supersonic gas flow. The latter creates an inhomogeneous gas density in the interelectrode region and thereby affects the value of E/N, which determines the electrical characteristics of the discharge. Numerical simulation results are confirmed by experimental data.

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Internal characteristics of distribution of glow discharge at supersonic speed gas flow in the positive column area

Тимеркаев

Zalyaliev

Egorov

2019

J. Phys.: Conf. Ser.

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Control of glow discharge parameters using transverse supersonic gas flow - numerical experiment

Cited by 11 publications

References 6 publications

Ion source surface processing based on glow discharge in supersonic cross gas flow control

Ion source surface processing based on glow discharge in supersonic cross gas flow control

Controlling the structure of a glow discharge by supersonic gas flow

Internal characteristics of distribution of glow discharge at supersonic speed gas flow in the positive column area

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