Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.

Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products. However, most of the current flexible temperature sensors only work well in a narrow temperature range, with their application at high or low temperatures still being a big challenge. This work proposes a flexible thermocouple temperature sensor based on aerogel blanket substrate, the temperature-sensitive layer of which uses the screen-printing technology to prepare indium oxide and indium tin oxide. It has good temperature sensitivity, with the test sensitivity reaching 226.7 μV °C−1 . Most importantly, it can work in a wide temperature range, from extremely low temperatures down to liquid nitrogen temperature to high temperatures up to 1200 °C, which is difficult to be achieved by other existing flexible temperature sensors. This temperature sensor has huge application potential in biomedicine, aerospace and other fields.

No abstract

No abstract

In the present study, a high-performance n-type temperature sensor was developed by a new and facile synthesis approach, which could apply to ambient temperature applications. As impacted by the low sintering temperature of flexible polyimide substrates, a screen printing technology-based method to prepare thermoelectric materials and a low-temperature heat treatment process applying to polymer substrates were proposed and achieved. By regulating the preparation parameters of the high-performance n-type indium oxide material, the optimal proportioning method and the post-treatment process method were developed. The sensors based on thermoelectric effects exhibited a sensitivity of 162.5 μV/°C, as well as a wide range of temperature measurement from ambient temperature to 223.6 °C. Furthermore, it is expected to conduct temperature monitoring in different scenarios through a sensor prepared in masks and mechanical hands, laying a foundation for the large-scale manufacturing and widespread application of flexible electronic skin and devices.

Thin film thermocouples (TFTCs) made up of indium tin oxide (ITO) and indium oxide (In 2 O 3 ) are designed and fabricated on a flexible substrate (polyimide) by radio frequency magnetron sputtering to satisfy the application needs of real-time monitoring of the surface temperature of non-planar objects. The microstructure and thermoelectric property of TFTCs are investigated under different annealing temperatures and the results show that the best annealing treatment result is achieved at 200 • C for 1 h. After the annealing treatment, the temperature resolution of the flexible TFTCs can reach 0.1 • C, and the hysteresis error and repeatability error can reach 2.06% and ±1.287%, respectively. An electromotive force (EMF) experiment shows that the average Seebeck coefficient of flexible TFTCs annealed at 300 • C can reach 56.90 µV • C −1 which is more than 8.5 times higher than the unannealed ones when the temperature difference is 200 • C. In addition, different output characteristics are obtained when TFTCs are placed on the inner and outer surfaces with different curvatures. Keeping the temperature difference between the hot and cold ends of the TFTCs constant, the flexible TFTCs also have the ability to measure the angle by measuring the EMF. The sensors show good application potential in temperature measurement in a curved plane and the measurement of the curvature of a curved surface.

No abstract

No abstract