A thin-film temperature sensor based on a flexible electrode and substrate

Abstract

Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.

Research of a Novel Ag Temperature Sensor Based on Fabric Substrate Fabricated by Magnetron Sputtering

“…Types of flexible temperature sensors mainly include thermal resistance sensors [15], thermocouple sensors [16], and thermistor sensors [17]. Mu et al [18] designed a thermal resistance sensor of Pt as temperature sensing layer with a serpentine structure on a polyimide substrate.…”

Flexible Thin-Film Speaker Integrated with an Array of Quantum-Dot Light-Emitting Diodes for the Interactive Audiovisual Display of Multi-functional Sensor Signals

“…With the recent dramatic increase in the demand for wearable devices, there has been significant interest in the development of high-performance sensing technology that can collect and analyze various signals from the human body, that is, body temperature, pulse, and chemicals in sweat, and the external environment, that is, ultraviolet (UV) and toxic gas levels. − Extensive research has been also conducted on user-friendly interactive devices for the intuitive reading of detected bio-signals. − …”

A Breathable, Reusable, and Zero-Power Smart Face Mask for Wireless Cough and Mask-Wearing Monitoring

“…Perhaps, face mask wearing enforcement in densely populated places is one of the most effective means to stop the spread of virus, as respiratory face masks are highly effective in blocking most respiratory droplets and aerosols. , Despite these efforts, the increase in reported cases of COVID-19 continues, which has led to an urgent need for more effective ways to combat the coronavirus and restore society to a certain semblance of normalcy. To address this, smart face masks made by equipping respiratory face masks with electronic sensors and modules have been recently proposed. − To date, smart masks are mainly used for two purposes: (1) to monitor respiratory symptoms, such as cough, − , and (2) to enhance the filtration of airborne pathogens including coronaviruses; ,, both contribute to prevention and control of respiratory diseases. In addition to the significance in diminishing the pandemic, there has been a witnessed trend of smart masks and wearables for their potential in health monitoring and preventive care, − personalized behavior modeling, − and healthcare internet-of-things (IoTs). − Nevertheless, existing research largely ignores wearing comfort and breathability, which are crucial for user experience and compliance of wearing face masks.…”

“…The proposed smart face mask consists of a zero-power radio frequency (RF) harmonic transponder, which is attached to the inner side of an ordinary face mask and can be torn off and reattached for repeated usage (Figure b). To achieve better wearing comfort than current smart masks, − ,, the RF harmonic transponder is printed using spray-printed silver nanowires (AgNWs) on the multiscale porous polystyrene- block -poly­(ethylene- ran -butylene)- block -polystyrene (SEBS) substrate (Figure c); both nanomaterials are lightweight, flexible, stretchable, and, most importantly, breathable. Moreover, the 0.2–7 μm pores of the SEBS substrate can efficiently block the sunlight, while allowing transmission of the human-body infrared (IR) radiation (which is in some sense similar to a spectral filter), thereby enabling passive heat dissipation and/or passive cooling .…”

“…To address this, smart face masks made by equipping respiratory face masks with electronic sensors and modules have been recently proposed. 5−9 To date, smart masks are mainly used for two purposes: (1) to monitor respiratory symptoms, such as cough, [5][6][7]10 and (2) to enhance the filtration of airborne pathogens including coronaviruses; 8,9,11 both contribute to prevention and control of respiratory diseases. In addition to the significance in diminishing the pandemic, there has been a witnessed trend of smart masks and wearables for their potential in health monitoring and preventive care, 12−16 personalized behavior modeling, 17−20 and healthcare internetof-things (IoTs).…”