Research of a Novel Ag Temperature Sensor Based on Fabric Substrate Fabricated by Magnetron Sputtering

Abstract

TPU-coated polyester fabric was used as the substrate of a flexible temperature sensor and Ag nanoparticles were deposited on its surface as the temperature sensing layer by the magnetron sputtering method. The effects of sputtering powers and heat treatment on properties of the sensing layers, such as the temperature coefficient of resistance (TCR), linearity, hysteresis, drift, reliability, and bending resistance, were mainly studied. The results showed that the TCR (0.00234 °C−1) was the highest when sputtering power was 90 W and sputtering pressure was 0.8 Pa. The crystallinity of Ag particles would improve, as the TCR was improved to 0.00262 °C−1 under heat treatment condition at 160°. The Ag layer obtained excellent linearity, lower hysteresis and drift value, as well as good reliability and bending resistance when the sputtering power was 90 W. The flexible temperature sensor based on the coated polyester fabric improved the softness and comfortableness of sensor, which can be further applied in intelligent wearable products.

Neural Network-Enabled Flexible Pressure and Temperature Sensor with Honeycomb-like Architecture for Voice Recognition

“…Obtained data show that the device exhibits excellent linearity (R 2 = 0.99), with a slope of 2.9 Ω/ • C. The temperature coefficient of resistance, as an important indicator of the temperature sensor, is defined as TCR = (∆R/R 0 )/∆T, where ∆R denotes the resistance change before and after a certain temperature is applied, R 0 denotes the initial temperature value, and ∆T represents the change of the applied temperature. The fitted TCR of the temperature sensor is 0.13% • C for the range of 25 • C to 105 • C, which is comparable to that reported in the previous literature [30,31]. We further explore the mechanical properties of the flexible temperature sensor by measuring nominal resistance change of the device under different bending states, as shown in Figure 1e.…”

A review on the role of plasma technology in the nano‐finishing of textile materials with metal and metal oxide nanoparticles

“…On the other hand, the Ag temperature sensing layer deposited on the thermoplastic polyuretane ‐coated PET fabric by magnetron sputtering showed ultrahigh electric conductivity. [ 107 ]…”

“…[105] The utilization of magnetron sputtering for the fabrication of textile sensors recently gained scientific attention. [106][107][108] Metal/plasma polymer nanocomposite coatings are recognized as suitable materials for various sensor applications. So far Ag NPs deposited on the fabrics were exploited for the production of flexible humidity and temperature sensors.…”

“…On the other hand, the Ag temperature sensing layer deposited on the thermoplastic polyuretane -coated PET fabric by magnetron sputtering showed ultrahigh electric conductivity. [107] The interest for Cu-based NPs is continually growing because small amounts of these NPs ensure fast bacterial and fungal inactivation in the dark due to high cytotoxicity compared to Ag and other heavy metals. [98] Many efforts have been made to elucidate the mechanism of antimicrobial action of Cu nano-films deposited on textile surfaces using different magnetron sputtering modes.…”

Printed Thick Film Resistance Temperature Detector for Real-Time Tube Furnace Temperature Monitoring

“…Recently, thick film temperature sensors enabled in situ temperature monitoring and offer advantages such as no damage to the substrate and low interference [24,25]. Techniques employed in the fabrication of thick film temperature sensors include magnetron sputtering [26], electro-hydrodynamic printing technology [27], and screen printing [28], among others. Although the magnetron sputtering process produces films of superior quality, it cannot deposit films on large structures due to the size limitations of the processing chamber and requires a long preparation cycle and high cost [29,30].…”