Ultrasonic cavitation in nanofluids improves material removal rate and surface quality. Ultrasonic cavitation in nanofluids was investigated using molecular dynamics simulations. The formation and growth of nanobubbles were promoted, by nanoparticles in water systems. Three distinct impact stages were observed which were caused by the impact of the shock wave, nanojet and nanoparticle. These differed in the system without a nanoparticle. The material removal rate was primarily caused by the nanoparticle hit, a result of the nanobubble collapsing during the third impact. A mechanism of material removal in ultrasonic polishing is discussed at a nanometric level.
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