Time-frequency analysis of laser-excited surface acoustic waves based on synchrosqueezing transform

Liu, Zaiwei; Lin, Bin; Liang, Xiaohu; Du, Anyao

doi:10.1016/j.ultras.2020.106147

Cited by 16 publications

(3 citation statements)

References 23 publications

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“…To obtain precise NDT results, it is vital to obtain an accurate SAW dispersion curve. [31][32][33] There are several approaches for determining the dispersion of the phase velocity from the normal displacement. In this study, a slant stack transformation was developed to calculate the phase velocity of SAW, which is rapid and enables the dispersion curve to be revealed with remarkable accuracy.…”

Section: Slant Stack Transformationmentioning

confidence: 99%

Nondestructive Determination of Young's Modulus of Interconnecting Thin Films by a Broadband Surface Acoustic Wave‐Interdigital Transducer

Zhang

Xiao

et al. 2023

Physica Rapid Research Ltrs

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A facile and rapid method for nondestructive testing (NDT) of the Young's modulus of interconnecting thin films using a broadband surface acoustic wave‐interdigital transducer (SAW‐IDT) is presented herein. A linear periodic SAW‐IDT with 20–125 MHz is designed and fabricated to excite surface acoustic wave (SAW) signals on the samples. By applying burst excitations under different frequencies, the SAW waveforms are picked up by a miniaturized piezoelectric transducer and processed by slant stack transformation. Consequently, the SAW dispersion curves over a wide frequency band are established to match the film parameters. Young's modulus of the 100 and 300 nm thickness of SiO2 films and the 800 and 1500 nm low‐k polyimide (PI) films is characterized. The nanoindentation method, as a control experiment, is also carried out to verify the accuracy of the SAW method, and the test results show that the SAW method can eliminate the effect of the substrate with higher precision. This work shows the advantage of the NDT technique by SAW‐IDT in measuring the Young's modulus of ultrathin films with low cost, controllable frequency range, and high accuracy.

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Section: Slant Stack Transformationmentioning

confidence: 99%

Nondestructive Determination of Young's Modulus of Interconnecting Thin Films by a Broadband Surface Acoustic Wave‐Interdigital Transducer

Zhang

Xiao

et al. 2023

Physica Rapid Research Ltrs

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“…As an analysis method of time-varying signals, synchrosqueezing transform (SST) [1] has attracted much attention recently [2]. However, with more and more research, many studies have found the disadvantage of SST, i.e., it can not effectively locate the IF when processing strong time-varying signals.…”

Section: Introductionmentioning

confidence: 99%

Local maximum multi-synchrosqueezing transform for the analysis of time-varying signals

Wei

Huang

et al. 2023

J. Phys.: Conf. Ser.

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Synchrosqueezing transform (SST) and its improved algorithm are used to process time-varying signals and have been widely developed in the field of signal processing recently. However, processing strong time-varying signals is still a tricky problem. Multisynchrosqueezing transform (MSST) is an excellent time-frequency (TF) analysis technique for processing strong time-varying signals. However, some TF points will not be rearranged using this method. So we propose a new algorithm named local maximum multi-synchrosqueezing transform. The method detects the local maximum of MSST to address the problem existing in MSST. In this way, a near-perfect TF analysis method used to analyze time-varying signals is generated. Simulated signal and experimental data demonstrate the effectiveness of our method.

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“…In recent years, different authors have been studying the possibility of using surface acoustic wave (SAW) dispersion to characterize surfaces and different layer-on-substrate structures [1][2][3][4][5][6]. In particular, thin metal layers [7], sol-gel layers [8], and stress gradients [9] have been characterized by the authors of these publications.…”

Section: Introductionmentioning

confidence: 99%

Dimensional and mechanical characterization of metallic thin films based on the measurement of surface acoustic waves dispersion with Slant Stack transform

Kadi¹,

Duquennoy²,

Fall³

et al. 2020

Meas. Sci. Technol.

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In this study, an ultrasonic method for characterizing thin films based on the dispersion of the first Rayleigh mode is presented. The principle of surface acoustic waves (SAW) generation using a broadband transducer and their detection is detailed. It is shown that over a frequency range between 20 MHz and 125 MHz, SAWs are sensitive to fine deposits and the attenuation is reasonable thus enabling measurements over 20 mm. The Slant Stack transform used to obtain the experimental dispersion curves with excellent signal-to-noise ratios is then presented and analyzed. Finally, four samples of silicon on which gold layers 400 nm, 300 nm, 180 nm, and 50 nm thick had been deposited and characterized. The thicknesses and the elastic parameters of the gold layers and the silicon substrate were obtained from the inversions performed on the experimental dispersion curves. These results show the efficiency of the non-destructive ultrasonic technique associated with a Slant Stack transform before inversion.

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Time-frequency analysis of laser-excited surface acoustic waves based on synchrosqueezing transform

Cited by 16 publications

References 23 publications

Nondestructive Determination of Young's Modulus of Interconnecting Thin Films by a Broadband Surface Acoustic Wave‐Interdigital Transducer

Nondestructive Determination of Young's Modulus of Interconnecting Thin Films by a Broadband Surface Acoustic Wave‐Interdigital Transducer

Local maximum multi-synchrosqueezing transform for the analysis of time-varying signals

Dimensional and mechanical characterization of metallic thin films based on the measurement of surface acoustic waves dispersion with Slant Stack transform

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