An uni ed strategy for achieving heterogeneous tool integration within the technology computeraided design (TCAD) realm is presented. Geometry, grid and surface mesh servers are de ned and implemented in a program that contains the di erent data and provides common services for TCAD applications. These services form the backbone of the integration framework. Functional abstraction is used to provide uni ed access to the servers' data and procedures. The role of each server and their interactions, including those with applications, are delineated. Existing tools such as SUPREM-IV and SPEEDIE, together with new tools have been integrated to illustrate the utility and versatility of the approach. This paper discusses the integration strategy, shows results and fully speci es standard functional server interfaces needed for TCAD tool integration.
Progress in technology CAD (TCAD) tools that span the range of IC circuit design, semiconductor device modeling, and material processing simulation is discussed. Special emphasis is given to the application in the opto-electronic devices and systems. Promising techniques for the mixed device/circuit simulation are presented using UC Berkeley's SPICE and Stanford's PISCES programs. Results show the capability to optimize the circuit timing and impedances to match the internal physical effects and the resulting optical properties in AlGaAs based LEDs. 3D solid modeling, a new approach for interactive device design based on the mask layout information, is discussed. Automatic gridding to support a unified process/device modeling capability for GaAs structures using SUPREM-IV.GS is also introduced. Taken as a whole, the unification of these TCAD tools provides a powerful design approach for the world of the opto-electronic ICs (OEIC).
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