We used SU-8 shrinkage to fabricate strained graphene resonators to produce a high quality factor in a graphene resonator. A-few-layer graphene resonators were fabricated on a trench of an SU-8 resist. These resonators were clamped with diamond-like carbon (DLC), which was deposited by using focused-ion-beam chemical vapor deposition (FIB-CVD), and trimmed by using FIB etching. Annealing was used to apply tensile strain to the graphene resonators because SU-8 shrinks drastically. We also observed an increase in resonant frequency and quality factor in these graphene resonators after annealing. At room temperature, the quality factor of the best sample exceeded 7,000 for a resonator length of 10 µm.

We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.