Mechanical properties of few layer graphene cantilever

Matsui, Kazuma; Inaba, Akira; Oshidari, Yuta; Takei, Yusuke; Takahashi, Hidetoshi; Takahata, Tomoyuki; Kometani, Reo; Matsumoto, Kiyoshi; Shimoyama, Isao

doi:10.1109/memsys.2014.6765834

Cited by 12 publications

(19 citation statements)

References 10 publications

(24 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The silicon proof masses of all resulting devices are 16.4 µm thick and have a quadratic shape with side lengths ranging from 10-50 µm. Thus, these proof masses are three to seven orders of magnitude heavier than the thin coatings deposited on suspended graphene that have been previously reported in literature [18][19][20] (Supplementary Section S6, Table S2). 5 For our devices we used double-layer graphene, which resulted in fabrication yields of the suspended ribbons with attached proof masses of well above 50%.…”

Section: Device Fabricationmentioning

confidence: 64%

See 1 more Smart Citation

Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers

et al. 2019

View full text Add to dashboard Cite

Nanoelectromechanical system (NEMS) sensors and actuators could be of use in the development of next generation mobile, wearable, and implantable devices. However, these NEMS devices require transducers that are ultra-small, sensitive and can be fabricated at low cost. Here, we show that suspended double-layer graphene ribbons with attached silicon proof masses can be used as combined spring-mass and piezoresistive transducers. The transducers, which are realized using processes that are compatible with large-scale semiconductor manufacturing technologies, can yield NEMS accelerometers that occupy at least two orders of magnitude smaller die area than conventional state-of-the-art silicon accelerometers. With our devices, we also extract the Young's modulus values of double-layer graphene and show that the graphene ribbons have significant built-in stresses.

show abstract

Section: Device Fabricationmentioning

confidence: 64%

“…For reference, a detailed comparison of Young's modulus values of different graphene-based materials is provided in Supplementary Section S25, Table S17. 20…”

Section: Discussionmentioning

confidence: 99%

Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers

et al. 2019

View full text Add to dashboard Cite

show abstract

“…For the triangular cantilever devices (Figure 1(d)), we find f 0 =3.79±1.16 MHz, Q=467.74±166.55, and a mechanical damping coefficient that is 1.1% of that seen in the drumheads. The cantilevered geometries presented here are unique due to their large aspect ratios, up to 1.66 in this work compared to less than 1 for previously fabricated graphene cantilevers [25]. We observe a significantly increased amplitude response for both types of cantilevers, roughly by a factor of 10 compared to drumheads at similar optical drive powers (Figure 4).…”

Section: Mechanical Characteristics Of Shaped Graphene Devicesmentioning

confidence: 60%

“…Our data from these measurements is summarized in Figure 5(b). A device with a 30 degree tether angle gave a measured Q of 849, which is the highest Q to date for a graphene cantilever at room temperature [25]. In this case, the damping dropped to 0.47% the value for drumheads.…”

Section: Mechanical Characteristics Of Shaped Graphene Devicesmentioning

confidence: 83%

Shape tailoring to enhance and tune the properties of graphene nanomechanical resonators

Miller

Alemán

2017

2D Mater.

View full text Add to dashboard Cite

The shape of a nanomechanical resonator profoundly affects its mechanical properties and determines its suitability for various applications, such as ultra-sensitive mass and force detection. Despite the promise of two-dimensional nanomechanical systems in such applications, full control over the shape of suspended two-dimensional materials, such as graphene, has not been achieved. We present an effective, single-step method to shape presuspended graphene into nanomechanical resonators with arbitrary geometries leading to enhanced properties in comparison to conventional drumheads. Our technique employs focused ion beam milling and achieves feature sizes ranging from a few tens of nanometers to several microns, while obtaining near perfect yield. We compare the mechanical properties of the shaped devices to unmodified drumheads, and find that low-tension, singlyclamped graphene cantilevers display a 20-fold increase in the mechanical quality factor (Q) with a factor 100 reduction in the mechanical damping. Importantly, we achieve these results while simultaneously removing mass, which enables state-of-the-art force sensitivity for a graphene mechanical resonator at room temperature. Our approach opens up a unique, currently inaccessible regime in graphene nanomechanics, one characterized by low strain, low frequency, small mass, and high Q, and facilitates tailoring of non-linearity and damping in mechanical structures composed of graphene and other 2D crystals.

show abstract

“…However, the realization of suspended graphene with large attached proof masses is difficult, and to the best of our knowledge, no such examples have been reported in the literature. 4 A previous report of suspended graphene membranes with very small masses included micrometresized few-layer graphene cantilevers with diamond allotrope carbon masses (0.5 µm in length, 1.5 µm in width and 20 nm in thickness, with a corresponding weight of 5.7 × 10 -14 g) fabricated using focused ion beam (FIB) deposition for the study of the mechanical properties of graphene 45 .…”

Section: Introductionmentioning

confidence: 99%

Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

et al. 2020

View full text Add to dashboard Cite

Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in microand nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene.We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields. We have demonstrated the manufacture of square graphene membranes with side lengths from 7 µm to 110 µm and suspended proof masses consisting of solid silicon cubes that are from 5 µm × 5 µm × 16.4 µm to 100 µm × 100 µm × 16.4 µm in size. Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies, and the manufacturing yields of the graphene membranes with suspended proof masses were greater than 90%, with more than 70% of the graphene membranes having more than 90% graphene area without visible defects. The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz, with quality factors ranging from 63 to 148. The graphene membranes with suspended proof masses were extremely robust and were able to withstand indentation forces from an atomic force microscope (AFM) tip of up to ~7000 nN. The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances.

show abstract

Mechanical properties of few layer graphene cantilever

Cited by 12 publications

References 10 publications

Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers

Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers

Shape tailoring to enhance and tune the properties of graphene nanomechanical resonators

Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications

Contact Info

Product

Resources

About