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Ferroelectric materials offer a low-energy, high-speed alternative to conventional logic and memory circuitry. Hafnia-based films have achieved singledigit nm ferroelectricity, enabling further device miniaturization. However, they can exhibit nonideal behavior, specifically wake-up and fatigue effects, leading to unpredictable performance variation over consecutive electronic switching cycles, preventing large-scale commercialization. The origins are still under debate. Using plasmon-enhanced spectroscopy, a non-destructive technique sensitive to <1% oxygen vacancy variation, phase changes, and single switching cycle resolution, the first real-time in operando nanoscale direct tracking of oxygen vacancy migration in 5 nm hafnium zirconium oxide during a pre-wake-up stage is provided. It is shown that the pre-wake-up leads to a structural phase change from monoclinic to orthorhombic phase, which further determines the device wake-up. Further migration of oxygen ions in the phase changed material is then observed, producing device fatigue. These results provide a comprehensive explanation for the wake-up and fatigue with Raman, photoluminescence and darkfield spectroscopy, combined with density functional theory and finite-difference time-domain simulations.

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The multi-holed electrode that has been reported to enhance the electron density of the capacitively coupled plasma is now being adopted to speed up the processes. However, the discharge condition when the multi-holed electrode enhances the electron density of the discharge at fixed power is not studied. At low pressure, the multi-holed electrode increased the electron density of the plasma at fixed power. However, the multi-holed electrode is experimentally revealed to lower the electron density at high pressure. In this paper, the different roles of the multi-holed electrode are experimentally studied.

Recently, as the national policy of green growth is promoted, construction field also makes an effort to reduce CO2 gas released when producing cement continuously. In other words, as the method solving environmental pollution and resources exhaustion, lots of mineral material compounds such as blast furnace slag which is industrial by-product, fly ash, red mud, etc. are examined to be used as the substitute good of cement. Therefore, this study intended to supplement the weaknesses of blast furnace slag and red mud with blast furnace slag and red mud, as the substitute good of cement, not concrete compound, manufacture inorganic composite of cement world, which can be made with only alkali accelerator at normal temperature, without high-temperature plasticity. After confirming kinds of red mud and alkali liquids and physical property by the change of addition rate with fundamental experiment, proper mix was drawn by combining blast furnace slag.