Survivability in shock environment is an important reliability index of silicon micro-gyroscope. Shock response of dual-mass silicon micro-gyroscope is investigated in this paper. A lumped mass model was established for the micro-gyroscope based on the characteristics of the dual-mass structure. Analytic solution to the response of the structure under shock load in a half-sine acceleration form was then acquired. The analytic solution was applied to calculate the shock response of a well designed dual-mass silicon micro-gyroscope in our laboratory, while the correctness of it was verified with finite element method (FEM) in ANSYS. The analytic solution is serviceable in reliability prediction of dual-mass silicon micro-gyroscope in shock environment.
The influence of temperature’s variation upon the resonant frequency and damping of the Micro-Electro- Mechanical-System (MEMS) gyroscope’s silicon structure in the vacuum package is investigated in this article. The gyroscope’s working principle and the dual-mass decoupled gyroscope structure are introduced, the drive and sense modes’ frequencies are analyzed. The ideal models of resonant frequency and damping are established and the dominate elements of impacting the resonant frequency and damping are Young Modulus, air viscosity coefficient and ambient pressure respectively. The experiments and the results proved that the frequency model works well, and the damping model only can simulate the tendency because of the air getter’s influence.
This paper presents an enhanced lift-off process for forming side electrode on the quartz –based double-ended tuning fork (DETF) resonator. In the case of fabricating quartz-based DETF, electrode pattern design is an important issue. Taking advantage of the piezoelectricity effect, a simple surface electrode can excite the flexural motion of the DETF, however it suffers from the large motional resistance. Proposed lift-off process can pattern excitation electrode on the side wall without using special photolithograph equipments. Experimental results demonstrated that the motional resistance can be reduced by several times by forming side electrode using proposed process.
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