Abstract:This paper presents an enhanced lift-off process for forming side electrode on the quartz –based double-ended tuning fork (DETF) resonator. In the case of fabricating quartz-based DETF, electrode pattern design is an important issue. Taking advantage of the piezoelectricity effect, a simple surface electrode can excite the flexural motion of the DETF, however it suffers from the large motional resistance. Proposed lift-off process can pattern excitation electrode on the side wall without using special photolit… Show more
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