Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure

Cao, Hui Liang; Li, Hong Sheng; Xu, Li; Ni, Yun Fang

doi:10.4028/www.scientific.net/kem.562-565.280

Cited by 3 publications

(2 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…After the gyroscope structure and circuit parameters are determined, each parameter in Equation ( 45 ) is a known quantity except for

and

can be acquired by the drive mode control system [ 20 ], and

is considered a function of the change with

[ 21 ]. Figure 8 shows the relationship between

, and

.…”

Section: Automatic Frequency Tuning Systemmentioning

confidence: 99%

Automatic Frequency Tuning Technology for Dual-Mass MEMS Gyroscope Based on a Quadrature Modulation Signal

et al. 2018

View full text Add to dashboard Cite

In order to eliminate the frequency mismatch of MEMS (Microelectromechanical Systems) gyroscopes, this paper proposes a frequency tuning technology based on a quadrature modulation signal. A sinusoidal signal having a frequency greater the gyroscope operating bandwidth is applied to the quadrature stiffness correction combs, and the modulation signal containing the frequency split information is then excited at the gyroscope output. The effects of quadrature correction combs and frequency tuning combs on the resonant frequency of gyroscope are analyzed. The tuning principle based on low frequency input excitation is analyzed, and the tuning system adopting this principle is designed and simulated. The experiments are arranged to verify the theoretical analysis. The wide temperature range test (-20∘normalC–60∘normalC) demonstrates the reliability of the tuning system with a maximum mismatch frequency of less than 0.3 Hz. The scale factor test and static test were carried out at three temperature conditions (−20 ∘C, room temperature, 60 ∘C), and the scale factor, zero-bias instability, and angle random walk are improved. Moreover, the closed-loop detection method is adopted, which improves the scale factor nonlinearity and bandwidth under the premise of maintaining the same static performances compared with the open-loop detection by tuning.

show abstract

“…After the gyroscope structure and circuit parameters are determined, each parameter in Equation ( 45 ) is a known quantity except for

and

can be acquired by the drive mode control system [ 20 ], and

is considered a function of the change with

[ 21 ]. Figure 8 shows the relationship between

, and

.…”

Section: Automatic Frequency Tuning Systemmentioning

confidence: 99%

Automatic Frequency Tuning Technology for Dual-Mass MEMS Gyroscope Based on a Quadrature Modulation Signal

et al. 2018

View full text Add to dashboard Cite

show abstract

“…For many applications, such as in military and aerospace applications, the sensors not only have to perform with a high degree of stability, but also have to withstand a higher level of shock. Therefore, it is crucial to improve the reliability and survivability of MEMS devices in a shock environment [ 1 , 2 ].…”

Section: Introductionmentioning

confidence: 99%

A Lever Coupling Mechanism in Dual-Mass Micro-Gyroscopes for Improving the Shock Resistance along the Driving Direction

Gao

Huang

et al. 2017

Sensors

View full text Add to dashboard Cite

This paper presents the design and application of a lever coupling mechanism to improve the shock resistance of a dual-mass silicon micro-gyroscope with drive mode coupled along the driving direction without sacrificing the mechanical sensitivity. Firstly, the mechanical sensitivity and the shock response of the micro-gyroscope are theoretically analyzed. In the mechanical design, a novel lever coupling mechanism is proposed to change the modal order and to improve the frequency separation. The micro-gyroscope with the lever coupling mechanism optimizes the drive mode order, increasing the in-phase mode frequency to be much larger than the anti-phase one. Shock analysis results show that the micro-gyroscope structure with the designed lever coupling mechanism can notably reduce the magnitudes of the shock response and cut down the stress produced in the shock process compared with the traditional elastic coupled one. Simulations reveal that the shock resistance along the drive direction is greatly increased. Consequently, the lever coupling mechanism can change the gyroscope’s modal order and improve the frequency separation by structurally offering a higher stiffness difference ratio. The shock resistance along the driving direction is tremendously enhanced without loss of the mechanical sensitivity.

show abstract

Design, analysis, and fabrication of silicon-based MEMS gyroscope for high-g shock platform

et al. 2019

View full text Add to dashboard Cite

Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure

Cited by 3 publications

References 5 publications

Automatic Frequency Tuning Technology for Dual-Mass MEMS Gyroscope Based on a Quadrature Modulation Signal

Automatic Frequency Tuning Technology for Dual-Mass MEMS Gyroscope Based on a Quadrature Modulation Signal

A Lever Coupling Mechanism in Dual-Mass Micro-Gyroscopes for Improving the Shock Resistance along the Driving Direction

Design, analysis, and fabrication of silicon-based MEMS gyroscope for high-g shock platform

Contact Info

Product

Resources

About