Thin-film slot antennas for 2.5 THz submillimeter radiation were fabricated by the photolithographic method on a fused quartz substrate. The antenna properties were investigated by measuring the antenna patterns for 2.5 THz CH3OH laser radiation. It was found that the fabricated antennas work as receiving antennas at 2.5 THz. The measured antenna patterns agreed with the theoretical antenna patterns in free space despite the dielectric substrate.
A slot array antenna with parasitic slots was fabricated with the goal of increasing the gain of a slot antenna on a thick dielectric substrate operating in both millimeter and submillimeter wave regions. By using the design values obtained by microwave model experiments, a 9 4 4 H z millimeter-wave slot array antenna was fabricated on a f u d quartz substrate and the power gain of this antema was experimentally studied. The fabricated antenna was found to operate as an array antenna at 94 GHz. Its power gain was increased by 5 -6 dB over that of the single-slot antenna. This value agreed well with the 5.5dB gain improvement derived in the microwave model experiments. Hence, it was confined that the parasitic slots effectively contribute to the gain improvement of the antenna.
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