With a view to improving the gain of the slot antenna on a dielectric substrate operating in the millimeter and submillimeter wave regions, slot array antennas with parasitic elements for 94 and 700 GHz have been designed and fabricated. The power gains and the receiving patterns of the antennas have been experimentally derived and compared with theoretical results. It is found that the experimental values of the fabricated six‐slot antennas agree well with the theoretical ones, and the gain is improved by about 6 dB over that for the single slot. © 1998 Scripta Technica, Electron Comm Jpn Pt 1, 81(10): 9–18, 1998