Preparation of CuInSe2 thin films by evaporation of In2Se3 and Cu2Se is proposed. Sequential evaporation of In2Se3 and Cu2Se is superior in controlling composition of films and the p-type film with 24 cm2/V路s in Hall mobility is obtained. By heating substrates during deposition and using rf plasma, we have succeeded in obtaining the <112> highly oriented CuInSe2 thin films.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations鈥揷itations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.