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Laser forming of metal plates offers the advantages of requiring no external forces, cost reduction, and increasing flexibility. It also enables forming of some materials and shapes that are impossible by using the traditional methods. This article presents a finite-element model (FEM) for two-scan laser forming with different intervals along the same path. On the basis of the proposed model, the FEM simulation of the temperature and displacement fields is studied. The simulated results show that the plastic deformation is larger if the interval between the first scan and the second scan is short, which aids the bending process because of the heat retained in the plate.

This work reports that, for the first time, the engineering of eSiGe proximity and eSiGe layer-one (L1) thickness modulates gate oxide integrity and device performance simultaneously in the leading edge FinFET technology. It is observed that there is a tradeoff between the benefit of transistor performance and the cost of gate oxide breakdown voltage (Vbd) degradation. TEM analysis indicates that eSiGe L1 is exposed to interfacial-layer/high-K in replaced-metal-gate (RMG) processes, suggesting gate oxide Vbd is compromised by germanium oxide formation at the L1 and high-k boundary. Thus, the strategy of FinFET junction optimization needs to consider not only transistor performance but also the gate oxide integrity.

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Laser forming is a flexible sheet metal forming technique, which achieves a desirable shape by non-uniform thermal stress induced by laser beam without hard tooling and external forces. In engineering applications, a singly curved surface is extensively applied in forming parts. To acquire high accurate shape in laser forming, a new design approach is proposed to determinate path planning and process parameters of complicated singly curved shape. This approach mainly includes three steps, curve division, path planning and process parameters determination. Finally, to validate the effectiveness of the method, a sine curved plate is processed. The experimental result shows that the proposed approach is valid for complicated singly curved parts.