With the rapid commercialization of fifth generation (5G) technology in the world, the market demand for radio frequency (RF) filters continues to grow. Acoustic wave technology has been attracting great attention as one of the effective solutions for achieving high-performance RF filter operations while offering low cost and small device size. Compared with surface acoustic wave (SAW) resonators, bulk acoustic wave (BAW) resonators have more potential in fabricating high- quality RF filters because of their lower insertion loss and better selectivity in the middle and high frequency bands above 2.5 GHz. Here, we provide a comprehensive review about BAW resonator researches, including materials, structure designs, and characteristics. The basic principles and details of recently proposed BAW resonators are carefully investigated. The materials of poly-crystalline aluminum nitride (AlN), single crystal AlN, doped AlN, and electrode are also analyzed and compared. Common approaches to enhance the performance of BAW resonators, suppression of spurious mode, low temperature sensitivity, and tuning ability are introduced with discussions and suggestions for further improvement. Finally, by looking into the challenges of high frequency, wide bandwidth, miniaturization, and high power level, we provide clues to specific materials, structure designs, and RF integration technologies for BAW resonators.

Effective regulation of cell-surface interactions is critical for regenerative medicine and other cell-based therapies. Herein, visible-light-induced cell sheet harvesting based on silicon wafers with a p/n junction [Si(p/n)] is introduced. Cell sheets could quickly detach from the Si(p/n) surface after 10 min of visible-light illumination with maintained cell viability and functions. It is found that preadsorbed proteins on the Si(p/n) surface like BSA and collagen-I show light-induced desorption behaviors. Molecular dynamics simulation also indicates that long-range force caused by the photovoltaic effect of Si(p/n) under visible-light illumination plays a key role in triggering the release of the preadsorbed protein. It is suggested that such protein desorption behavior mediated by the photovoltaic effect is responsible for cell release. This work not only shows promising potential for cell sheet harvesting, but also provides new insights into protein-material interactions.

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Wide bandgap two-dimensional semiconductors are of paramount importance for developing van der Waals heterostructure electronics. This work reports the use of layer and strain engineering to introduce the feasibility of two-dimensional hexagonal (h)-AlN to fill the scientific and application gap. We show that such one- to five-layer h-AlN has an indirect bandgap, tunable from 2.9 eV for a monolayer to ∼3.5 eV for multilayer structures, along with isotropic effective masses and carrier mobilities between zigzag and armchair directions. With an increase in the layer number to bulk AlN, the bandgap will experience a transition from an indirect gap to direct gap. Surprisingly, high room-temperature mobilities of electrons and holes (of the order of 1000 cm2 V−1 s−1) in a relaxed monolayer h-AlN system and widely adjustable effective masses and carrier mobilities in a different layer h-AlN are observed. In the presence of strain engineering, the bandgap decreases obviously with an increase in tensile strain; meanwhile, the isotropy and value of effective mass or carrier mobility in monolayer h-AlN can also be modulated effectively; the hole mobilities in the armchair direction, especially, will be enhanced dramatically. With a tunable bandgap, high carrier mobilities, and modifiable isotropy, our results indicate that few-layer h-AlN has potential applications in future mechano-electronic devices.

Bulk acoustic wave (BAW) filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard complementary metal-oxide-semiconductor (CMOS) compatible integration process. However, it is challenging for a traditional aluminum nitride (AlN)-based BAW filter to meet several allocated 5G bands with more than a 5% fractional bandwidth via an acoustic-only approach. In this work, we propose an Al0.8Sc0.2N-based film bulk acoustic wave resonator (FBAR) for the design of radio frequency (RF) filters. By taking advantage of a high-quality Al0.8Sc0.2N thin film, the fabricated resonators demonstrate a large Keff2 of 14.5% and an excellent figure of merit (FOM) up to 62. The temperature coefficient of frequency (TCF) of the proposed resonator is measured to be −19.2 ppm/°C, indicating excellent temperature stability. The fabricated filter has a center frequency of 4.24 GHz, a −3 dB bandwidth of 215 MHz, a small insertion loss (IL) of 1.881 dB, and a rejection >32 dB. This work paves the way for the realization of wideband acoustic filters operating in the 5G band.

PHP and MYSQL has been the main web development tool for it is free and open source. The authors have discussed the environmental issues in development process based on PHP and MYSQL and the implementation process of the website ZhuoQi.

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