Dual-mode flexible ZnO/polyimide surface acoustic wave (SAW)-based ultraviolet (UV) light sensors were fabricated and their performance was investigated. UV light sensing measurements showed that the responses of the dual wave modes of the sensors increase with the increase of light intensity and the frequency changes linearly with the change of light intensity. Under a 4.5 mW cm−2 UV light illumination, the resonant frequency of the Rayleigh wave decreased up to ∼43 kHz, while that of the Lamb wave was approximately 76 kHz. The UV light sensitivities for the two resonant modes are 111.3 and 55.8 ppm (mW cm−2)–1, respectively. The resonant frequency, phase angle and amplitude of the two resonant modes exhibited a good repeatability in responding to cyclic change of the UV light, and an excellent stability up to a long duration of UV light exposure. The dual-mode flexible SAW resonators are simple in structure, more accurate in detection, and can be fabricated at low cost are, therefore, very promising for application in flexible sensors and electronics.

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Bulk acoustic wave (BAW) filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard complementary metal-oxide-semiconductor (CMOS) compatible integration process. However, it is challenging for a traditional aluminum nitride (AlN)-based BAW filter to meet several allocated 5G bands with more than a 5% fractional bandwidth via an acoustic-only approach. In this work, we propose an Al0.8Sc0.2N-based film bulk acoustic wave resonator (FBAR) for the design of radio frequency (RF) filters. By taking advantage of a high-quality Al0.8Sc0.2N thin film, the fabricated resonators demonstrate a large Keff2 of 14.5% and an excellent figure of merit (FOM) up to 62. The temperature coefficient of frequency (TCF) of the proposed resonator is measured to be −19.2 ppm/°C, indicating excellent temperature stability. The fabricated filter has a center frequency of 4.24 GHz, a −3 dB bandwidth of 215 MHz, a small insertion loss (IL) of 1.881 dB, and a rejection >32 dB. This work paves the way for the realization of wideband acoustic filters operating in the 5G band.

No abstract

In Southwest China, most regions are mountainous, where traditional drill-and-blast method is adopted to excavate relatively harder rocks. However, blasting would cause vibration to adjacent structures and might result in damage or even failure. This paper considers a case where subway tunnel is overlying an existing railway tunnel, while the excavation requires blasting method. Vibration and stress distribution are calculated via Dynamic Finite Element Method (DFEM) for both full-face excavation and CD method. Result shows that vibration induced by CD method is only 28% of that caused by full-face blasting with same distance. Peak vibration is located on the lining facing the blasting source, while peak tensile stress is on the other side of the contour due to the reflection of stress wave on strata boundary. And peak value of tensile stress induced by full-face blasting is capable of causing lining failure; thus full-face blasting is not suggested within 40 m beyond the underlying tunnel axis. However, CD method has shown much advantage, since blasting within 25 m is also considered safe to the underlying tunnel. But when the blasting source is as near as 12 m within the underlying tunnel, the CD method is no longer safe.