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A 6-bit Ku band digital step attenuator with low phase variation is presented in this paper. The attenuator is designed with 0.13-μm SiGe BiCMOS process technology using triple well isolation N-Metal-Oxide-Semiconductor (TWNMOS) and through-silicon-via (TSV). TWNMOS is mainly used to improve the performance of switches and reduce the insertion loss (IL). TSV is utilized to provide approximately ideal global current ground plane with low impedance for the attenuator. In addition, substrate floating technique and new capacitance compensation technique are adopted in the attenuator to improve the linearity and decrease the phase variation. The measured results show that the attenuator IL is 6.99–9.33 dB; the maximum relative attenuation is 31.87–30.31 dB with 0.5-dB step (64 states), the root mean square (RMS) for the amplitude error is 0.58–0.36 dB and the phase error RMS is 2.06–3.46° in the 12–17 GHz frequency range. The total chip area is 1 × 0.9 mm2.

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A 6-bit digitally controlled active phase shifter is implemented in 0.13-µm SiGe BiCMOS process for 6-18 GHz phased-arrays. An input passive balun with center open stub is applied to split the single input to differential and achieve high amplitude/phase balance. A degenerated-Q quadrature all-pass filter (QAF) is used to generate two orthogonal vectors with high I/Q accuracy over a wide bandwidth and a main digital-toanalog convertor (DAC) controls the I/Q amplitude to achieve 6-bit phase resolution. In addition, a calibration DAC is adopted to compensate the amplitude variations and the phase error introduced by balun and QAF. Consequently, high resolution along with low gain/phase error can be achieved. The phase shifter has achieved root mean square (RMS) phase error of <4.36°, and RMS gain error of <1.04 dB for all 6-bit phase states at 6-18 GHz. The power gain ranges from 0.95 dB at 6 GHz to −1.85 dB at 18 GHz. Input 1 dB compression point (IP −1dB) is 5.4-8 dBm at 6-18 GHz for 0°-phase state. The total power consumption is 74.4 mW, and the overall chip size is 1.8 × 1.3 mm 2 .

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