Zhang, Y., Dobson, P. , and Weaver, J. (2011)
AbstractIn this study dual cantilever resistive probes for scanning thermal microscopy (SThM) have been batch fabricated. In the dual probe, one is used as local heater and a second one nearby detects the thermal diffusivity at a microscopic scale. Various types of dual probes have been fabricated in one batch to allow experimental determination of the optimal sensor type for the measurement. Thermal scans with the dual cantilever probes have been performed in atmosphere, and contrast in thermal imaging indicating the difference of thermal conductivity is shown. Test of these probes under vacuum indicates strong thermal coupling through air between the two probes in the dual cantilever probes.
The thermal properties of sub-µm nanocrystalline diamond films in the range 0.37-1.1 µm grown by hot filament CVD, initiated by bias enhanced nucleation on a nm-thin Si-nucleation layer on various substrates, have been characterized by scanning thermal microscopy. After coalescence, the films have been outgrown with a columnar grain structure. The results indicate that even in the sub-µm range, the average thermal conductivity of these NCD films approaches 400 Wm -1 K -1 . By patterning the films into membranes and step-like mesas, the lateral and the vertical component of the thermal conductivity, k lateral and k vertical , have been isolated showing an anisotropy between vertical conduction along the columns, with k vertical ≈1000 Wm -1 K -1 , and a weaker lateral conduction across the columns, with k lateral ≈ 300 Wm -1 K -1 .
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