2011
DOI: 10.1016/j.mee.2011.02.040
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Batch fabricated dual cantilever resistive probe for scanning thermal microscopy

Abstract: Zhang, Y., Dobson, P. , and Weaver, J. (2011) AbstractIn this study dual cantilever resistive probes for scanning thermal microscopy (SThM) have been batch fabricated. In the dual probe, one is used as local heater and a second one nearby detects the thermal diffusivity at a microscopic scale. Various types of dual probes have been fabricated in one batch to allow experimental determination of the optimal sensor type for the measurement. Thermal scans with the dual cantilever probes have been performed in atm… Show more

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Cited by 18 publications
(15 citation statements)
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“…Since 1993, various thermal methods based on the use of different thermosensitive sensors or phenomena have been developed. They can be classified according to the temperature‐dependent mechanism that is used: thermovoltage , change in electrical resistance , fluorescence or thermal expansion .…”
Section: Instrumentation and Sthm Methodsmentioning
confidence: 99%
“…Since 1993, various thermal methods based on the use of different thermosensitive sensors or phenomena have been developed. They can be classified according to the temperature‐dependent mechanism that is used: thermovoltage , change in electrical resistance , fluorescence or thermal expansion .…”
Section: Instrumentation and Sthm Methodsmentioning
confidence: 99%
“…A large number of SThM probes have been developed, either as individually crafted cantilevers and sensors, 188,[192][193][194][195][196] or as batch fabricated thermocouples. 189,[197][198][199] Cretin et al…”
Section: Scanning Thermal Microscopymentioning
confidence: 99%
“…The many papers on applications of SThM published since 1995 have been accompanied by works on new probe types (Luo, Shi, Varesi, & Majumdar, 1997;Mills, Zhou, Midha, Donaldson, & Weaver, 1998;Janus et al, 2010;Zhang, Dobson, & Weaver, 2011;Tovee, Pumarol, Zeze, Kjoller, & Kolosov, 2012;Janus et al, 2014;Hofer et al, 2015), calibration methods (Lefèvre, Saulnier, Fuentes, & Volz, 2004;Dobson, Mills, & Weaver, 2005;Wielgoszewski, Babij, Szeloch, & Gotszalk, 2014), and attempts to improve the SThM technique itself (Oesterschulze & Stopka, 1996;Pollock & Hammiche, 2001;Kim et al, 2008;Wielgoszewski et al, 2011b;Juszczyk, Wojtol, & Bodzenta, 2013). To date, the greatest impact on the development of AFM-based thermal analysis comes from the following elements: • Development of microthermal analysis (μTA) (Pollock & Hammiche, 2001) and the closely related development of doped-silicon probes (discussed in the section entitled "Thermoresistive SThM Probes," later in this chapter), which enabled localized calometric measurements.…”
Section: Sthm Since 1995mentioning
confidence: 99%