2013
DOI: 10.1016/j.diamond.2013.10.004
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Thermal analysis of submicron nanocrystalline diamond films

Abstract: The thermal properties of sub-µm nanocrystalline diamond films in the range 0.37-1.1 µm grown by hot filament CVD, initiated by bias enhanced nucleation on a nm-thin Si-nucleation layer on various substrates, have been characterized by scanning thermal microscopy. After coalescence, the films have been outgrown with a columnar grain structure. The results indicate that even in the sub-µm range, the average thermal conductivity of these NCD films approaches 400 Wm -1 K -1 . By patterning the films into membrane… Show more

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Cited by 20 publications
(10 citation statements)
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References 19 publications
(25 reference statements)
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“…Nanocrystalline diamond films grown under different growth conditions can exhibit similar average grain sizes but rather different elastic properties which also affect the thermal properties . Also the thermal conductivities of nanocrystalline diamond films show a wide range . Besides that, the thermal conductivity, both in‐plane as well as cross‐plane often shows an evolution with film thickness due to increasing grain dimensions for increasing film thickness .…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Nanocrystalline diamond films grown under different growth conditions can exhibit similar average grain sizes but rather different elastic properties which also affect the thermal properties . Also the thermal conductivities of nanocrystalline diamond films show a wide range . Besides that, the thermal conductivity, both in‐plane as well as cross‐plane often shows an evolution with film thickness due to increasing grain dimensions for increasing film thickness .…”
Section: Introductionmentioning
confidence: 99%
“…Also the thermal conductivities of nanocrystalline diamond films show a wide range . Besides that, the thermal conductivity, both in‐plane as well as cross‐plane often shows an evolution with film thickness due to increasing grain dimensions for increasing film thickness .…”
Section: Introductionmentioning
confidence: 99%
“…20 and 25) to 500 W/mK (Ref. 26) and crossplane thermal conductivities ranging from 80 W/mK (Ref. 24) to more than 800 W/mK (Refs.…”
mentioning
confidence: 99%
“…22, 26, and 27) have been reported for sub 2 lm c-NCD. 22,26 These large variations in the reported values of j may arise not only from differences in the samples but also because of the different experimental techniques used in each experiment. 28 This makes it difficult to draw a clear conclusion about the phonon transport near the polycrystalline diamond nucleation site, i.e., in the c-NCD region.…”
mentioning
confidence: 99%
“…However, materials like HOPG conduct heat very well across a graphitic plane, but poorly between planes. Similarly, some types of CVD diamond exhibit initial columnar growth during synthesis, with the associated thermal conduction anisotropy [3][4][5].…”
Section: "Nsmentioning
confidence: 99%