The dielectric properties of (Ba 0.5 Sr 0.5 )TiO 3 (BST) thin films on LaAlO 3 (LAO) single crystals were studied over a wide frequency range. The samples with interdigital electrodes were prepared by microelectronic processing. The dielectric characterizations were carried out in the following steps: 1) the standard calibration of the instrument, 2) the removal of parasitic capacitance and the extraction of the capacitance of the interdigital capacitor (IDC) and 3) the extraction of the dielectric permittivity (ε) of BST. It was found that ε of BST has a constant value (about 400) from 50 MHz to 2 GHz; at higher frequencies, ε gradually decreases. The BST interdigital capacitors exhibited good dielectric tunability.
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