2003
DOI: 10.1016/s0167-9317(02)01014-6
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Preparation and characterization of (Ba, Sr)TiO3 thin films using interdigital electrodes

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Cited by 11 publications
(4 citation statements)
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“…Some dielectric and ferroelectric in-plane studies were conducted using interdigital capacitors (IDCs) for a variety of technological applications such as microwave integrated circuits 14 , surface acoustic wave (SAW) devices 15 and chemical sensors 16 . In-plane dielectric properties have thus been reported for polycrystalline barium strontium titanates (BST) 17,18 and epitaxial PMN-PT films 19 , and in-plane ferroelectric properties have been reported for epitaxial BST films on different oxide substrates 2022 . However, these reports do not include out-of-plane characterizations and do not contain enough experimental details for parameters extraction to evidence a possible anisotropy.…”
Section: Introductionmentioning
confidence: 99%
“…Some dielectric and ferroelectric in-plane studies were conducted using interdigital capacitors (IDCs) for a variety of technological applications such as microwave integrated circuits 14 , surface acoustic wave (SAW) devices 15 and chemical sensors 16 . In-plane dielectric properties have thus been reported for polycrystalline barium strontium titanates (BST) 17,18 and epitaxial PMN-PT films 19 , and in-plane ferroelectric properties have been reported for epitaxial BST films on different oxide substrates 2022 . However, these reports do not include out-of-plane characterizations and do not contain enough experimental details for parameters extraction to evidence a possible anisotropy.…”
Section: Introductionmentioning
confidence: 99%
“…The dielectric constant of the BMN thin films was extracted from the measured capacitance data using a partial capacitance method and an analytical model previously derived by Farnell et al [19,[21][22][23][24]. The measured capacitance, C exp , consists of the capacitance of the stray fields in the ambient space (air), C air , the capacitance of the BMN thin film layer, C film , and the capacitance of the substrate, C substrate .…”
Section: Microwave Dielectric Properties Measurementsmentioning
confidence: 99%
“…Therefore, the dielectric response of BMN thin film at microwave frequencies should be further explored for potential microwave applications. Moreover, compared with conventional planar capacitors with parallel plate electrodes configuration, the films are grown directly on the substrate in the coplanar device with interdigital electrodes structure, and the quality and orientation control of the films could be better than that of the planar capacitor [16][17][18][19].…”
Section: Introductionmentioning
confidence: 99%
“…Basic structure of a humidity sensor based on interdigital capacitors. and the interdigital electrodes have been used as transducers for many years [14][15][16][17][18][19]21]. According to the previous research, the IDC is extended to use for recognizing water content of the human skin and environmental humidity in this study.…”
Section: Introductionmentioning
confidence: 99%