The aim of the present work was to optimize a high efficiency process for multicrystalline silicon solar cells (including AI-gettering, oxide and hydrogen passivation, AI-BSF formation, photolithographically defined front metallization) and combine it with the mechanical texturization technique. New cell structures were created, in which only the areas between the front grid are Vgrooved. Solar cells were processed on various ribbon and conventional cast silicon materials. IV-characteristics, reflectance and spectral response were measured and analysed by two dimensional device simulation. A comparison with equally processed flat cells shows an increase of cell efficiencies by more than 25% due to the reduction of optical losses before antireflection coating and by additional 4% due to the enhanced collection probability in the V-groove volumes.
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