The work is devoted to the development of a new method for reconstructing the scattering properties of a rough surface, which is described using the bi-directional scattering distribution function (BSDF). There are several different methods of BSDF reconstruction using various approaches. However, they all have their drawbacks: for example, a method based on modeling the measured distribution of heights often requires a complicated fit apart from the expensive measurements themselves, various analytical methods are usu-ally operable within the average roughness values with their standard distribution, and a rather good and universal method for optimizing the normals distribution density does not support internal reflections on the elements of the roughest surface. The proposed solution uses the geometry models of the rough surface, which allows simulating a physically more accurate propagation of light through the rough surface taking into account internal reflections, and hence a more accurate reconstruction of the bidirectional scattering distribution function. The results of BSDF reconstruction with the new method are proved by comparison with measurement results.

We present a novel de-embedding method applicable to high frequency network analyzer measurements involving bisection of a THRU structure. Although similar methods have been published prior to this paper, to our knowledge this new method is unique in that one single de-embedding structure is required (a symmetric THRU), no other simplifying assumptions regarding the THRU structure are required, and no lumped element approximations are required.We present on-wafer measurements of single transistors and transmission line structures in several integrated circuit technologies comparing results using this de-embedding technique to other more commonly used de-embedding techniques (Y, Z subtraction) as well as to on-wafer calibration techniques. Most measurements are to 110 GHZ, with select measurements to 220 GHz illustrating the utility of the method well beyond frequencies at which lumped element approximations break down.-Index Terms -S-parameters, vector network analyzer, de-embedding, transmission matrix, transmission line, onwafer measurement.

The paper is devoted to the development of a method for reconstructing the scattering properties of a rough surface. The rough surface, in this case, is the dielectricair interface. Typically, these properties are described by the bidirectional scattering distribution function. Direct measuring of such functions is either impossible, or its cost is very high. The method of reconstructing the bidirectional scattering distribution function, based on the distribution of the elevations of the microrelief, requires a complicated fitting procedure and often yields not very good results. In the proposed solution, the rough surface is modelled by a parametric function that simulates the density distribution of the normals to the faces of the surface microrelief. The result of optimizing the density distribution of the normals to the faces of the surface microrelief is in good agreement with the expected one.

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