Deposition of Al onto the Si͑111͒7ϫ7 surface held at temperatures ranging from 475 to 600°C has been found to result in the formation of a superlattice of the identical-size nanoclusters ͑magic clusters͒. The Al magic clusters appear to have the structure similar to that reported recently for the magic clusters of Ga and In on Si͑111͒: each cluster contains six metal atoms linked by three Si atoms. The present results reveal that at the early stages of deposition all the group III metals demonstrate a distinct tendency for the formation of the magic clusters on Si surfaces.

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