We investigate the generation of high-order harmonics using laser pulse energies in the few-μJ range at high repetition rates. We analyse how the conversion efficiency is influenced by the tight focusing geometry required for the generation of high-order harmonics under these conditions. A generalized phase-matching model allows us to discuss macroscopic phase effects independent of focal length. We present experimental results using the example of a 100 kHz laser system to generate harmonics up to the 27th order in Ar with a photon flux up to 3 × 10 9 photons s −1 into one harmonic order. High-repetition-rate femtosecond or even attosecond light sources open new possibilities for a broad range of applications such as time-resolved photoelectron spectroscopy and microscopy in the extreme ultraviolet regime.

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We investigate macroscopic interference effects in high-order harmonic generation using a Ti:sapphire laser operating at a 100 kHz repetition rate. The structure and behavior of spectral and spatial interference fringes are explained and analytically described by transient phase matching of the long electron trajectory contribution. Time-frequency mapping due to the temporal chirp of the harmonic emission allows us to observe Maker fringes directly in the spectral domain.

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