Planar distributed full-tensor anisotropic metamaterials for cloaks of invisibility based on transformation electromagnetics are proposed. The proposed metamaterials are composed of nonresonant transmission lines and are advantageous in full control of the off-diagonal components of the permeability tensor as well as broadband and low-loss characteristics. The explicit design formulas for the metamaterials are given based on the equivalent circuit derived directly from Maxwell's equations. A carpet cloak of invisibility is designed and the validity of the design theory is confirmed by circuit simulations. In addition, the carpet cloak is implemented in microstrip line technology and its performance is demonstrated experimentally at microwave frequencies.
We investigated the channeling implantation of dopant ions into 4H-SiC in detail. The advantages of channeling implantation were clarified by both experimental and Monte Carlo simulation. Extremely abrupt deep profile with box-like can be formed by channeling implantation of Al and P ions. In the case of B and N ions, retrograde-like profile can be obtained by channeling implantation. The unique dopant profile can be realized by channeling implantation. Both vertical and lateral straggling becomes small by using channeling implantation for Al ions. This technique should contribute to improve the device performance such as gate pitch scaling and low specific on-resistance.
Newly developed sweep beam Cluster ion implanter: CLARIS with 0.2-7keV energy range for Boron beam and 1-10keV energy range for Carbon beam is introduced. Novel Cluster ion implantation technology is capable for 45nm beyond device requiring USJ formation (<15nm) with high retain dose (>70%) and low sheet resistivity (<1200Ω/sq). Comparison of retain dose and sheet resistivity of B 18 , BF 2 , and B beams with FLA shows the superiority of the B18 implantation for less than 500eV implantation.
In reconfigurable optical networks, an optical switch is indispensable to afford routing optical signals without optical/electrical conversion. A nested Mach-Zehnder interferometer (MZI) optical switch is suitable for a silicon-silica hybrid structure compared with a conventional cascaded MZI switch. We proposed to employ phase generating couplers (PGCs) instead of directional couplers (DCs) in the nested MZI optical switch. Calculation results show that the nested MZI switch with PGCs exhibits <−30 dB crosstalk over wider wavelength range than that using DCs.
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