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A miniature Fabry–Perot interferometric acoustic sensor with an ultra-high pressure sensitivity was constructed by using approximately 13 layers of graphene film as the diaphragm. The extremely thin diaphragm was transferred onto the endface of a ferrule, which had an inner diameter of 125 μm, and van der Waals interactions between the graphene diaphragm and its substrate created a low finesse Fabry–Perot interferometer with a cavity length of 98 μm. Acoustic testing demonstrated a pressure-induced deflection of 2380 nm kPa−1 and a noise equivalent acoustic signal level of ~2.7 mPa/Hz1/2 for a 3 dB bandwidth with a center frequency of 15 kHz. The sensor also exhibited a dynamic frequency response between 1 and 20 kHz, which conformed well to the result obtained by a reference microphone. The use of a suspended graphene diaphragm has potential applications in highly sensitive pressure/acoustic sensors.

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An Sb/InSe heterostructure manifests a varied direct bandgap under an electric field which is more favorable to FETs and MEMS devices.

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The BlueP/C2N vdW heterojunction exhibits the characteristics of electric field-controllable band alignment, which is favorable for multifunctional devices applications.

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