By placing several Si δ-doped layers close to the surface of a GaAs molecular beam epitaxy–grown crystal, we achieve a compensation of the Schottky barrier and obtain a good Ohmic contact between an in situ deposited (without breaking the vacuum) Al metallization layer and a highly modulation doped (n++) conduction layer embedded below the δ-doped layers in the GaAs crystal. When cooled to below the critical temperature (≊1.2 K) of Al, superconductivity is induced in the conductive layer of the semiconductor. We have studied the current voltage (I–V) characteristics in a planar geometry where the Al has been removed in a thin stripe. We find a manifestation of the superconducting energy gap and a rich fine structure at injection energies both below and above the gap.
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