This paper presents a buried quad p-n junction (BQJ) photodetector fabricated with a HV (high-voltage) CMOS process. Multiple buried junction photodetectors are wavelength-sensitive devices developed for spectral analysis applications where a compact integrated solution is preferred over systems involving bulk optics or a spectrometer due to physical size limitations. The BQJ device presented here is designed for chip-based biochemical analyses using simultaneous fluorescence labeling of multiple analytes such as with advanced labs-on-chip or miniaturized photonics-based biosensors. Modeling and experimental measurements of the spectral response of the device are presented. A matrix-based method for estimating individual spectral components in a compound spectrum is described. The device and analysis method are validated via a test setup using individually modulated LEDs to simulate light from 4-component fluorescence emission.
International audienceA buried quad junction (BQJ) photodetector has been designed and fabricated with a high-voltage CMOS process. It implements four vertically-stacked p-n junctions with four different spectral responses. This feature allows high spectral discriminating ability, greater than both conventional buried double junction and buried triple junction detectors. In this paper, we propose a SPICE-like model, based on the physical properties of the device structure. The proposed model has been integrated in EDA software. It could be used for rapid and reliable design of system on chip, integrating the BQJ sensor, and its signal processing. The analytical expressions of the four BQJ photocurrents, as well as dark currents, have been developed. The spectral characteristics of the photodetector, computed with the proposed model, have been compared with those from TCAD simulations and experimental measurements. The analytical is close to the measurement with an average error on spectral responses in the range of 3-17 %, depending on the considered junction
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.