We explored the characteristic behavior of low-temperature graphene growth on catalytic metal films. The results suggested that graphene growth originates from the crystalline facets with specific angles with respect to the crystalline orientation of the catalytic metals at low temperatures, which is different from the conventional growth models. The G/D ratio of the Raman spectrum of the graphene film was affected by both the number of specific facets and the width of the terrace. Because of this behavior, it is important to prepare the surface conditions with a smaller number of facets and a wider terrace for high-quality graphene growth at low temperatures.
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