Compact wavelength splitters based on angled multimode interferometers (AMMIs) on silicon nitride platforms working in visible lights are reported for fluorescence sensing applications. A diplexer and triplexer with different footprints are designed and experimentally demonstrated. The diplexer and triplexer have the insertion loss of ∼1.7 and ∼2.7 dB/channel with cross talks of less than -22 dB and -17 dB on target wavelengths, respectively. These splitters are used to distinguish the signals collected from two fluorescent dyes that give different emission spectra when excited with an excitation source, due to their different Stokes shifts. In the case of the triplexer, a third port is to collect the excitation light, both to monitor the remaining excitation power and to reduce the interference at the signal ports. A termination structure at the end of the AMMIs and input and output tapering waveguides as a part of the wavelength splitters are designed and their performances are presented.
Optical phased arrays (OPAs) with phase-monitoring and phase-control capabilities are necessary for robust and accurate beamforming applications. This paper demonstrates an on-chip integrated phase calibration system where compact phase interrogator structures and readout photodiodes are implemented within the OPA architecture. This enables phase-error correction for high-fidelity beam-steering with linear complexity calibration. A 32-channel OPA with 2.5-µm pitch is fabricated in an Si–SiN photonic stack. The readout is done with silicon photon-assisted tunneling detectors (PATDs) for sub-bandgap light detection with no-process change. After the model-based calibration procedure, the beam emitted by the OPA exhibits a sidelobe suppression ratio (SLSR) of −11 dB and a beam divergence of 0.97° × 0.58° at 1.55-µm input wavelength. Wavelength-dependent calibration and tuning are also performed, allowing full 2D beam steering and arbitrary pattern generation with a low complexity algorithm.
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