Germanium-on-silicon thermo-optic phase shifters are demonstrated in the 5 μm wavelength range. Basic phase shifters require 700 mW of power for a 2π phase shift. The required power is brought down to 80 mW by complete undercut using focused ion beam. Finally an efficient thermo-optic phase shifter is demonstrated on the germanium on SOI platform. A tuning power (for a 2π phase shift) of 105 mW is achieved for a Ge-on-SOI structure which is lowered to 16 mW for a free standing phase shifter.

We experimentally demonstrate extraction of silicon waveguide geometry with subnanometer accuracy using optical measurements. Effective and group indices of silicon-on-insulator (SOI) waveguides are extracted from the optical measurements. An accurate model linking the geometry of an SOI waveguide to its effective and group indices is used to extract the linewidths and thicknesses within respective errors of 0.37 and 0.26 nm on a die fabricated by IMEC multiproject wafer services. A detailed analysis of the setting of the bounds for the effective and group indices is presented to get the right extraction with improved accuracy.

Abstract-We propose and demonstrate an accurate method of measuring the effective refractive index and thermo-optic coefficient of silicon-on-insulator waveguides in the entire C-band using three Mach-Zehnder interferometers. The method allows for accurate extraction of the wavelength dispersion and takes into account fabrication variability. Wafer scale measurements are performed and the effective refractive index variations are presented for three different waveguide widths: 450, 600, and 800 nm, for the TE polarization. The presented method is generic and can be applied to other waveguide geometries and material systems and for different wavelengths and polarizations.Index Terms-Effective refractive index, thermo-optic coefficients, waveguides, wavelength filtering devices.

Abstract-We propose a compact, temperature-insensitive, all-silicon Mach-Zehnder interferometer (MZI) filter that uses the polarization-rotating asymmetrical directional couplers. Temperature sensitivity of the filter is less than 8pm/K for a wavelength range of 30 nm. The device achieves a reduced footprint by making use of different polarizations, which is made possible by the asymmetric directional couplers that act both as a splitter/combiner and as a polarization rotator. Simulation of the device shows that it can also be useful for gas sensing and bio-sensing applications with 3 times larger response to cladding changes while keeping a thermally robust behavior.

Abstract-We propose a method to make silicon optical finite impulse response filters tolerant to fabrication (waveguide geometry) and ambient thermal variations. We experimentally demonstrate a Mach-Zehnder interferometer filter with fabrication and thermal tolerance, both separately and together. The fabrication-tolerant device measurements show a 20-fold improved tolerance to systematic waveguide linewidth variations with a wavelength shift of <60 pm/nm linewidth change. The fabrication-and thermal-tolerant device is possible using orthogonal polarizations in the two arms. The fabricated device shows a shift of less than ±65 pm/nm and a thermal drift smaller than ±15 pm/K over a wavelength range of 40 nm. Simulations show that this concept can be extended to multichannel filters.