2015
DOI: 10.1109/jlt.2015.2476603
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Experimental Extraction of Effective Refractive Index and Thermo-Optic Coefficients of Silicon-on-Insulator Waveguides Using Interferometers

Abstract: Abstract-We propose and demonstrate an accurate method of measuring the effective refractive index and thermo-optic coefficient of silicon-on-insulator waveguides in the entire C-band using three Mach-Zehnder interferometers. The method allows for accurate extraction of the wavelength dispersion and takes into account fabrication variability. Wafer scale measurements are performed and the effective refractive index variations are presented for three different waveguide widths: 450, 600, and 800 nm, for the TE … Show more

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Cited by 44 publications
(26 citation statements)
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“…For instance, it is fairly easy to calculate the effective index of a waveguide mode with an eigenmode solver, but it is very difficult to directly meausure the effective index of a waveguide on a chip. For this, special test structures need to be designed . Therefore, it is important to include relevant test structures in the chip design.…”
Section: Challenges For An Integrated Photonic Design Flowmentioning
confidence: 99%
See 1 more Smart Citation
“…For instance, it is fairly easy to calculate the effective index of a waveguide mode with an eigenmode solver, but it is very difficult to directly meausure the effective index of a waveguide on a chip. For this, special test structures need to be designed . Therefore, it is important to include relevant test structures in the chip design.…”
Section: Challenges For An Integrated Photonic Design Flowmentioning
confidence: 99%
“…As a result, simulating the fabricated geometry to extract the effective index will also introduce an error. Alternatively, a test structure can be designed to directly measure the effective index, but in this process there will also be errors due to measurement alignment and variability in the coupling structure.…”
Section: Challenges For An Integrated Photonic Design Flowmentioning
confidence: 99%
“…The measurement of these parameters, including their wavelength dependence and the statistics of their variability, is critically important for understanding the behavior of PICs and for tracking fabrication errors [1]. It is possible to discover the variations in waveguide dimensions by characterization of group refractive index, but this requires a very accurate method.…”
Section: Introductionmentioning
confidence: 99%
“…It is possible to discover the variations in waveguide dimensions by characterization of group refractive index, but this requires a very accurate method. Many approaches have been proposed in literature [1,2]. On-chip interferometers have been used to experimentally extract the group refractive index with high accuracy, but such structures cannot be embedded alongside target devices [1].…”
Section: Introductionmentioning
confidence: 99%
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