Grating devices on a silicon nitride technology platform for visible light applications

Song, Jeong Hwan; Kongnyuy, Tangla D.; Troia, Benedetto; Saseendran, Sandeep S.; Soussan, Philippe; Jansen, Roelof; Rottenberg, Xavier

doi:10.1364/osac.2.001155

Cited by 28 publications

(10 citation statements)

References 12 publications

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“…Reference devices, that is without PhC-cavity, show a peak transmission for Ta 2 O 5 -on-insulator grating couplers of up to −5.5 dB and support a 10 dB bandwidth that covers the wavelength range of interest (Figure e). This performance is comparable to state-of-the-art devices based on single step lithography in Ta 2 O 5 (for telecom wavelengths) as well as other nanophotonic material systems that are transparent for visible wavelengths, such as Si 3 N 4 . The transmission spectrum of devices with 1D PhC-cavities show a sharp resonance around 705 nm, from which we determine a quality factor of Q = 3735 ± 60 via a Lorentzian fit to the data (see Figure e).…”

Section: Resultsmentioning

confidence: 51%

“…This performance is comparable to state-of-the-art devices based on single step lithography in Ta 2 O 5 (for telecom wavelengths) 34 as well as other nanophotonic material systems that are transparent for visible wavelengths, such as Si 3 N 4 . 42 The transmission spectrum of devices with 1D PhC-cavities show a sharp resonance around 705 nm, from which we determine a quality factor of Q = 3735 ± 60 via a Lorentzian fit to the data (see Figure 1e). This value translates into a cavity decay rate 20 of κ/2π = ω c /Q = 114 + −2 GHz, which is larger than the radiative decay rate 43 γ/2π ≈ 10 MHz but smaller than the dephasing rate 44 of γ*/2π ≈ 1 THz of the NV-center, as desired for operation in the "good-cavity"-regime.…”

Section: ■ Resultsmentioning

confidence: 97%

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Integration of Diamond-Based Quantum Emitters with Nanophotonic Circuits

et al. 2020

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Nanophotonics provides a promising approach to advance quantum technology by replicating fundamental building blocks of nanoscale quantum optic systems in large numbers with high reproducibility on monolithic chips. While photonic integrated circuit components and single-photon detectors offer attractive performance on silicon chips, the large-scale integration of individually accessible quantum emitters has remained a challenge. Here, we demonstrate simultaneous optical access to several integrated solid-state spin systems with Purcell-enhanced coupling of single photons with high modal purity from lithographically positioned nitrogen vacancy centers into photonic integrated circuits. Photonic crystal cavities embedded in networks of tantalum pentoxide-on-insulator waveguides provide efficient interfaces to quantum emitters that allow us to optically detect magnetic resonances (ODMR) as desired in quantum sensing. Nanophotonic networks that provide configurable optical interfaces to nanoscale quantum emitters via many independent channels will allow for novel functionality in photonic quantum information processors and quantum sensing schemes.

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Section: Resultsmentioning

confidence: 51%

Section: ■ Resultsmentioning

confidence: 97%

Integration of Diamond-Based Quantum Emitters with Nanophotonic Circuits

et al. 2020

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“…Recently, many efforts have been done to couple light from fiber to Si 3 N 4 platform in the NIR range (around 1.55 µm) [ 34 , 35 , 36 ], reaching a measured coupling efficiency as low as −1.75 dB [ 34 ], using a bottom multilayer reflector and an apodized grating coupler. However, few works have been published for coupling in the visible wavelength range [ 37 , 38 , 39 ].…”

Section: Edge Fiber Coupling Of Designed Sensorsmentioning

confidence: 99%

“…These designs exhibit higher coupling efficiencies than most fiber couplers proposed for the Si 3 N 4 platform at the same wavelength range [ 37 , 38 , 39 ]. This is mainly due to the different waveguide dimensions, as the optimum waveguides for sensing have small core thickness dimensions; thus, exhibiting a large mode size which leads to better matching with the fiber mode.…”

Section: Edge Fiber Coupling Of Designed Sensorsmentioning

confidence: 99%

Optimization of Silicon Nitride Waveguide Platform for On-Chip Virus Detection

Shamy

Swillam

2022

Sensors

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This work presents a rigorous and generic sensitivity analysis of silicon nitride on silicon dioxide strip waveguide for virus detection. In general, by functionalizing the waveguide surface with a specific antibodies layer, we make the optical sensor sensitive only to a particular virus. Unlike conventional virus detection methods such as polymerase chain reaction (PCR), integrated refractive index (RI) optical sensors offer cheap and mass-scale fabrication of compact devices for fast and straightforward detection with high sensitivity and selectivity. Our numerical analysis includes a wide range of wavelengths from visible to mid-infrared. We determined the strip waveguide’s single-mode dimensions and the optimum dimensions that maximize the sensitivity to the virus layer attached to its surface at each wavelength using finite difference eigenmode (FDE) solver. We also compared the strip waveguide with the widely used slot waveguide. Our theoretical study shows that silicon nitride strip waveguide working at lower wavelengths is the optimum choice for virus detection as it maximizes both the waveguide sensitivity (Swg) and the figure of merit (FOM) of the sensor. The optimized waveguides are well suited for a range of viruses with different sizes and refractive indices. Balanced Mach–Zehnder interferometer (MZI) sensors were designed using FDE solver and photonic circuit simulator at different wavelengths. The designed sensors show high FOM at λ = 450 nm ranging from 500 RIU−1 up to 1231 RIU−1 with LMZI = 500 µm. Different MZI configurations were also studied and compared. Finally, edge coupling from the fiber to the sensor was designed, showing insertion loss (IL) at λ = 450 nm of 4.1 dB for the design with FOM = 500 RIU−1. The obtained coupling efficiencies are higher than recently proposed fiber couplers.

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“…Though compact Raman sensors are available, on-chip Raman spectroscopy is ultimately desired because of its ability to be integrated into a complete and miniaturized device package. Among different platforms, photonic circuits have the advantages of integrating on-chip light sources, detectors, and wavelength demultiplexing components, − all in one module through grating couplers − and microresonators. − Thus, the material selection of the optical waveguide, the key element of photonic circuits, is critical and requires unique material features of high refractive index, low autofluorescence, and low Raman noise floor. In addition, a waveguide with proper design can form a strong evanescent field, which not only enhances the interaction between the excitation light and the analytes but can improve the Raman scattering efficiency to enable accurate Raman sensing. − …”

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confidence: 99%

Benzene Derivatives Analysis Using Aluminum Nitride Waveguide Raman Sensors

Makela

Gordon

et al. 2020

Anal. Chem.

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Raman spectroscopy using aluminum nitride (AlN) optical waveguides was demonstrated for organic compound analysis. The AlN waveguide device was prepared by reactive sputtering deposition and complementary-metal-oxide semiconductor (CMOS) processes. A fundamental waveguide mode was observed over a broad visible spectrum and the waveguide evanescent wave was used to excite the Raman signals of the test analytes. The performance of the waveguide sensor was characterized by measuring the Raman spectra of the benzene derivative mixtures consisting of benzene, anisole, and toluene. The compositions and concentrations were resolved by correlating the obtained Raman spectrum with the characteristic Raman peaks associated with C−C, C−H, and C−O functional groups. With the advantages of real-time detection and enhanced Raman signal intensity, the AlN waveguides provided a sensor platform for nondestructive and online chemical compound monitoring.

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Grating devices on a silicon nitride technology platform for visible light applications

Cited by 28 publications

References 12 publications

Integration of Diamond-Based Quantum Emitters with Nanophotonic Circuits

Integration of Diamond-Based Quantum Emitters with Nanophotonic Circuits

Optimization of Silicon Nitride Waveguide Platform for On-Chip Virus Detection

Benzene Derivatives Analysis Using Aluminum Nitride Waveguide Raman Sensors

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