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High-quality and reproducible perovskite layer fabrication routes are essential for the implementation of efficient planar solar cells. Here, we introduce a sequential vapor-processing route based on physical vacuum evaporation of a PbCl2 layer followed by chemical reaction with methyl-ammonium iodide vapor. The demonstrated vapor-grown perovskite layers show compact, pinhole-free, and uniform microstructure with the average grain size of ~ 320 nm. Planar heterojunction perovskite solar cells are fabricated using TiO2 and spiro-OMeTAD charge transporting layers in regular n-i-p form. The devices exhibit the best efficiency of 11.5% with small deviation indicating the high uniformity and reproducibility of the perovskite layers formed by this route.Electronic supplementary materialThe online version of this article (10.1186/s11671-017-2401-5) contains supplementary material, which is available to authorized users.