Precise materials integration in nanostructures is fundamental for future electronic and photonic devices. We demonstrate Si, Ge, and SiGe nanostructure direct-write with deterministic size, geometry, and placement control. The biased probe of an atomic force microscope (AFM) reacts diphenylsilane or diphenylgermane to direct-write carbon-free Si, Ge, and SiGe nano and heterostructures. Parallel direct-write is available on large areas by substituting the AFM probe with conducting microstructured stamps. This facile strategy can be easily expanded to a broad variety of semiconductor materials through precursor selection.
Experiments and simulations are used to elucidate a new class of chemical reactions occurring near the tip-sample interface during high field chemistry of diphenylgermane. Current data during writing and bias dependent growth rate are analyzed, supplemented with data from ionization mass spectrometry, and compared with the simulation results.
Workshop Summary:The Toolbox Dialogue Initiative conducted two workshops with Michigan State University faculty on May 4, 2017 and one with administrators on May 24, 2017. The first faculty workshop –“Group 1” in what follows – comprised white faculty, while the second, “Group 2”, comprised faculty of color. The administrator workshop, “Group 3”, comprised a mixed-race group of administrators. These 3-hour workshops included dialogue structured by prompt-based instruments customized specifically to emphasize epistemic exclusion. The instruments were designed by Michael O’Rourke and Stephanie E. Vasko, with significant input from Nicole Buchanan, Kristie Dotson, and Isis Settles. (See Appendix 1 for the Toolbox instruments and prompts used in each workshop.) The workshops were facilitated by Michael O’Rourke and Stephanie E. Vasko and began with a presentation briefly covering the Faculty Inclusion and Excellence Study, epistemic exclusion, the Toolbox approach, instrument design, and details about the workshop. The dialogue sessions lasted between 50 and 70 minutes and were followed by a co-creation activity. The cocreation activity during the faculty workshops was designed to inform the administration workshop, and the co-creation activity during the administration workshop was intended to inform MSU policy concerning valuing and evaluating scholarship at MSU. The workshops concluded with a debrief discussion and reflection on the process.
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